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Applied result detail
KOLÍBAL, M.; MUSÁLEK, T.; ELIÁŠ, M.
Original Title
Prekurzorový vstup do reaktoru
English Title
Precursor inlet into CVD reactor
Type
Functioning sample
Abstract
Difuzor z nerezové oceli pro rovnoměrnou distribuci plynů v CVD aparatuře, se vstupy se Swagelok koncovkou.
Abstract in English
Gas diffusor from stainless steel for equal distribution of gases in CVD chamber, with inlets with Swagelok connection.
Keywords
chemical vapor deposition, diffusor, precursor
Key words in English
Location
laboratoře CEITEC Nano
Licence fee
The result is being used by the owner
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http://surfaces.fme.vutbr.cz/laboratories/developed-instruments/custom-cvd-showerhead?stage=Stage