Publication result detail

Design and Control of an Active Stage for Suppressing Motion Induced Vibration in Optical Inspection Systems

PAN, S., CHEN, K.; VĚCHET, S.

Original Title

Design and Control of an Active Stage for Suppressing Motion Induced Vibration in Optical Inspection Systems

English Title

Design and Control of an Active Stage for Suppressing Motion Induced Vibration in Optical Inspection Systems

Type

Paper in proceedings (conference paper)

Original Abstract

Fast positioning and vibration suppression play important roles in virtually all tasks requiring high speed maneuvers with sufficient motion accuracy

English abstract

Fast positioning and vibration suppression play important roles in virtually all tasks requiring high speed maneuvers with sufficient motion accuracy

Keywords

active stage; rubber bearing; flexible structure; vibration suppression; image inspection

Key words in English

active stage; rubber bearing; flexible structure; vibration suppression; image inspection

Authors

PAN, S., CHEN, K.; VĚCHET, S.

RIV year

2023

Released

07.12.2022

Location

Pilsen

ISBN

978-1-6654-1040-3

Book

2022 20th International Conference on Mechatronics - Mechatronika (ME)

Pages from

1

Pages to

6

Pages count

6

URL

https://ieeexplore.ieee.org/document/9982985

BibTex

@inproceedings{BUT182474,
  author="PAN, S., CHEN, K. and VĚCHET, S.",
  title="Design and Control of an Active Stage for Suppressing Motion Induced Vibration in Optical Inspection Systems",
  booktitle="2022 20th International Conference on Mechatronics - Mechatronika (ME)",
  year="2022",
  pages="1--6",
  address="Pilsen",
  doi="10.1109/ME54704.2022.9982985",
  isbn="978-1-6654-1040-3",
  url="https://ieeexplore.ieee.org/document/9982985"
}