Publication result detail

Electromagnetic Modeling of a Plasma Chamber: Theory and Experiments

FIALA, P.; DREXLER, P.; KLÍMA, M.; SZABÓ, Z.; DOSTÁL, L.; KADLEC, R.; PERNICA, R.

Original Title

Electromagnetic Modeling of a Plasma Chamber: Theory and Experiments

English Title

Electromagnetic Modeling of a Plasma Chamber: Theory and Experiments

Type

Paper in proceedings (conference paper)

Original Abstract

We propose finite element method — based models facilitating simulation of tuned plasma discharges in an argon atmosphere. The models, in which we focused on the adjustment options and relevant numerical analyses, allowed us to design a plasma discharge jet and to characterize the behavior of a discharge therein. A set of functional experiments were performed, evaluated, and compared throughout the research. Overall, the plasma chamber finds use in surface treatment at a nanometric distance from the material-air interface; such a procedure can produce special layers of inorganic/organic materials conceived as resonant structures. The paper exposes the ability of a plasma discharge to operate as a parametric instrument that alters the electromagnetic and mechanical properties on the surface of the applied material.

English abstract

We propose finite element method — based models facilitating simulation of tuned plasma discharges in an argon atmosphere. The models, in which we focused on the adjustment options and relevant numerical analyses, allowed us to design a plasma discharge jet and to characterize the behavior of a discharge therein. A set of functional experiments were performed, evaluated, and compared throughout the research. Overall, the plasma chamber finds use in surface treatment at a nanometric distance from the material-air interface; such a procedure can produce special layers of inorganic/organic materials conceived as resonant structures. The paper exposes the ability of a plasma discharge to operate as a parametric instrument that alters the electromagnetic and mechanical properties on the surface of the applied material.

Keywords

plasma, discharge, argon, jet, electromagnetic field, numerical analysis

Key words in English

plasma, discharge, argon, jet, electromagnetic field, numerical analysis

Authors

FIALA, P.; DREXLER, P.; KLÍMA, M.; SZABÓ, Z.; DOSTÁL, L.; KADLEC, R.; PERNICA, R.

RIV year

2022

Released

21.11.2021

Publisher

IEEE

ISBN

978-1-7281-7247-7

Book

2021 Photonics & Electromagnetics Research Symposium (PIERS)

ISBN

1559-9450

Periodical

Progress In Electromagnetics

State

United States of America

Pages from

609

Pages to

613

Pages count

5

URL

https://ieeexplore.ieee.org/document/9694874

BibTex

@inproceedings{BUT177622,
  author="Pavel {Fiala} and Petr {Drexler} and Miloš {Klíma} and Zoltán {Szabó} and Lukáš {Dostál} and Radim {Kadlec} and Roman {Pernica}",
  title="Electromagnetic Modeling of a Plasma Chamber: Theory and Experiments",
  booktitle="2021 Photonics & Electromagnetics Research Symposium (PIERS)",
  year="2021",
  journal="Progress In Electromagnetics",
  pages="609--613",
  publisher="IEEE",
  doi="10.1109/PIERS53385.2021.9694874",
  isbn="978-1-7281-7247-7",
  issn="1559-9450",
  url="https://ieeexplore.ieee.org/document/9694874"
}