Publication result detail

Analysis of impact of conic aperture in differentially pumped chamber

MAXA, J.; ŠABACKÁ, P.; VYROUBAL, P.

Original Title

Analysis of impact of conic aperture in differentially pumped chamber

English Title

Analysis of impact of conic aperture in differentially pumped chamber

Type

Scopus Article

Original Abstract

The paper focuses on the simulation of medium dynamics in the environmental scanning electron microscope. In particular, the paper examines the conical aperture location effect in the differentially pumped chamber and the width of the pumping channel in this chamber. The solution is based on the Taylor-Maccoll theory about the impact of the shock wave and was obtained by the use of continuum and finite volume methods in the ANSYS Fluent system.

English abstract

The paper focuses on the simulation of medium dynamics in the environmental scanning electron microscope. In particular, the paper examines the conical aperture location effect in the differentially pumped chamber and the width of the pumping channel in this chamber. The solution is based on the Taylor-Maccoll theory about the impact of the shock wave and was obtained by the use of continuum and finite volume methods in the ANSYS Fluent system.

Keywords

ANSYS Fluent; Differentially pumped chamber; Environmental scanning electron microscope (ESEM); Finite volume method; Taylor-Maccoll theory

Key words in English

ANSYS Fluent; Differentially pumped chamber; Environmental scanning electron microscope (ESEM); Finite volume method; Taylor-Maccoll theory

Authors

MAXA, J.; ŠABACKÁ, P.; VYROUBAL, P.

RIV year

2023

Released

01.01.2019

Publisher

University of Defence

Location

Brno

ISBN

1802-2308

Periodical

Advances in Military Technology

Volume

14

Number

1

State

Czech Republic

Pages from

151

Pages to

161

Pages count

11

URL

https://www.unob.cz/fvt/vyzkum_vyvoj/Stranky/aimt/aimt.aspx

BibTex

@article{BUT177389,
  author="Jiří {Maxa} and Pavla {Šabacká} and Petr {Vyroubal}",
  title="Analysis of impact of conic aperture in differentially pumped chamber",
  journal="Advances in Military Technology",
  year="2019",
  volume="14",
  number="1",
  pages="151--161",
  doi="10.3849/aimt.01268",
  issn="1802-2308",
  url="https://www.unob.cz/fvt/vyzkum_vyvoj/Stranky/aimt/aimt.aspx"
}