Publication result detail

On the influence of uncertainties in scattering potentials on quantitative analysis using keV ions

BRUCKNER, B.; STRAPKO, T.; SORTICA, M.; BAUER, P.; PRIMETZHOFER, D.

Original Title

On the influence of uncertainties in scattering potentials on quantitative analysis using keV ions

English Title

On the influence of uncertainties in scattering potentials on quantitative analysis using keV ions

Type

WoS Article

Original Abstract

Experimental spectra from Medium-Energy Ion Scattering were compared to Monte-Carlo simulations (employing the TRBS code) to obtain information on the scattering potential. The impact of uncertainties in the interatomic potential on quantification of sample properties such as thickness, composition or electronic stopping was investigated for different scattering geometries: backscattering and transmission. For backscattered He ions with tens of keV primary energy the scattering potential was found to overestimate the multiple scattering background in the energy spectra resulting in an uncertainty of < 3 % in quantitative analysis. Light ions transmitted through a sample for equivalent path length in the medium are only affected minorly by changes in the scattering potential. This effect becomes more distinct for heavier primary ions.

English abstract

Experimental spectra from Medium-Energy Ion Scattering were compared to Monte-Carlo simulations (employing the TRBS code) to obtain information on the scattering potential. The impact of uncertainties in the interatomic potential on quantification of sample properties such as thickness, composition or electronic stopping was investigated for different scattering geometries: backscattering and transmission. For backscattered He ions with tens of keV primary energy the scattering potential was found to overestimate the multiple scattering background in the energy spectra resulting in an uncertainty of < 3 % in quantitative analysis. Light ions transmitted through a sample for equivalent path length in the medium are only affected minorly by changes in the scattering potential. This effect becomes more distinct for heavier primary ions.

Keywords

Medium-Energy Ion Scattering; Low-Energy Ion Scattering; Interaction potential; Screening corrections; Monte-Carlo simulations

Key words in English

Medium-Energy Ion Scattering; Low-Energy Ion Scattering; Interaction potential; Screening corrections; Monte-Carlo simulations

Authors

BRUCKNER, B.; STRAPKO, T.; SORTICA, M.; BAUER, P.; PRIMETZHOFER, D.

RIV year

2022

Released

01.05.2020

Publisher

ELSEVIER

Location

AMSTERDAM

ISBN

0168-583X

Periodical

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Volume

470

Number

1

State

Kingdom of the Netherlands

Pages from

21

Pages to

27

Pages count

7

URL

https://www.sciencedirect.com/science/article/pii/S0168583X20300690

BibTex

@article{BUT177353,
  author="Barbara {Bruckner} and Tomáš {Strapko} and Mauricio {Sortica} and Peter {Bauer} and Daniel {Primetzhofer}",
  title="On the influence of uncertainties in scattering potentials on quantitative analysis using keV ions",
  journal="NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS",
  year="2020",
  volume="470",
  number="1",
  pages="21--27",
  doi="10.1016/j.nimb.2020.02.018",
  issn="0168-583X",
  url="https://www.sciencedirect.com/science/article/pii/S0168583X20300690"
}