Publication result detail

Modeling Electrostatic MEMS Actuator

KOLKA, Z.; BIOLKOVÁ, V.; BIOLEK, D.; BIOLEK, Z.

Original Title

Modeling Electrostatic MEMS Actuator

English Title

Modeling Electrostatic MEMS Actuator

Type

Paper in proceedings (conference paper)

Original Abstract

The paper deals with a mathematical model of electrostatic MEMS (Micro-Electro-Mechanical Systems) actuator with an associated mechanical system. The model mimics the behavior of a commercial MEMS-driven micromirror. It is shown that the electric port of the electrostatic comb drive can be correctly modeled as a generic memcapacitor whose state equation describes the dynamic behavior of the cooperating mechanical subsystem. The so-called narrow-band frequency-dependent hysteresis, associated with such types of MEMS, is analyzed.

English abstract

The paper deals with a mathematical model of electrostatic MEMS (Micro-Electro-Mechanical Systems) actuator with an associated mechanical system. The model mimics the behavior of a commercial MEMS-driven micromirror. It is shown that the electric port of the electrostatic comb drive can be correctly modeled as a generic memcapacitor whose state equation describes the dynamic behavior of the cooperating mechanical subsystem. The so-called narrow-band frequency-dependent hysteresis, associated with such types of MEMS, is analyzed.

Keywords

MEMS, electrostatic actuator, micromirror, memcapacitor, state equation, modeling, simulation, pinched hysteresis

Key words in English

MEMS, electrostatic actuator, micromirror, memcapacitor, state equation, modeling, simulation, pinched hysteresis

Authors

KOLKA, Z.; BIOLKOVÁ, V.; BIOLEK, D.; BIOLEK, Z.

RIV year

2022

Released

28.11.2021

Publisher

IEEE

Location

Dubai, UAE

ISBN

978-1-7281-8281-0

Book

2021 28th IEEE International Conference on Electronics, Circuits, and Systems (ICECS) Proceedings

Pages from

1

Pages to

5

Pages count

5

Full text in the Digital Library

http://hdl.handle.net/

BibTex

@inproceedings{BUT175569,
  author="Zdeněk {Kolka} and Viera {Biolková} and Dalibor {Biolek} and Zdeněk {Biolek}",
  title="Modeling Electrostatic MEMS Actuator",
  booktitle="2021 28th IEEE International Conference on Electronics, Circuits, and Systems (ICECS) Proceedings",
  year="2021",
  pages="1--5",
  publisher="IEEE",
  address="Dubai, UAE",
  isbn="978-1-7281-8281-0"
}