Publication result detail

Beam shaping and probe characterization in the scanning electron microscope

ŘIHÁČEK, T.; HORÁK, M.; SCHACHINGER, T.; MIKA, F.; MATĚJKA, M.; KRÁTKÝ, S.; FOŘT, T.; RADLIČKA, T.; JOHNSON, C.; NOVÁK, L.; SEĎA, B.; MCMORRAN, B.; MÜLLEROVÁ, I.

Original Title

Beam shaping and probe characterization in the scanning electron microscope

English Title

Beam shaping and probe characterization in the scanning electron microscope

Type

WoS Article

Original Abstract

Here we demonstrate the use of nanofabricated grating holograms to diffract and shape electrons in a scanning electron microscope. The diffraction grating is placed in an aperture in the column. The entire diffraction pattern can be passed through the objective lens and projected onto the specimen, or an intermediate aperture can be used to select particular diffracted beams. We discuss several techniques for characterizing the diffraction pattern. The grating designs can incorporate features that can influence the phase and intensity of the diffracted SEM probe. We demonstrate this by producing electron vortex beams.

English abstract

Here we demonstrate the use of nanofabricated grating holograms to diffract and shape electrons in a scanning electron microscope. The diffraction grating is placed in an aperture in the column. The entire diffraction pattern can be passed through the objective lens and projected onto the specimen, or an intermediate aperture can be used to select particular diffracted beams. We discuss several techniques for characterizing the diffraction pattern. The grating designs can incorporate features that can influence the phase and intensity of the diffracted SEM probe. We demonstrate this by producing electron vortex beams.

Keywords

Electron diffraction;SEM;Electron beam structuring;Spot shape measurement;Electron vortex beam

Key words in English

Electron diffraction;SEM;Electron beam structuring;Spot shape measurement;Electron vortex beam

Authors

ŘIHÁČEK, T.; HORÁK, M.; SCHACHINGER, T.; MIKA, F.; MATĚJKA, M.; KRÁTKÝ, S.; FOŘT, T.; RADLIČKA, T.; JOHNSON, C.; NOVÁK, L.; SEĎA, B.; MCMORRAN, B.; MÜLLEROVÁ, I.

RIV year

2021

Released

21.04.2021

Publisher

Elsevier

ISBN

0304-3991

Periodical

ULTRAMICROSCOPY

Volume

225

Number

1

State

Kingdom of the Netherlands

Pages from

1

Pages to

9

Pages count

9

URL

https://doi.org/10.1016/j.ultramic.2021.113268

BibTex

@article{BUT171291,
  author="Tomáš {Řiháček} and Michal {Horák} and Thomas {Schachinger} and Filip {Mika} and Milan {Matějka} and S. {Krátký} and Tomáš {Fořt} and Tomáš {Radlička} and C.W. {Johnson} and Libor {Novák} and Bohuslav {Seďa} and B.J. {McMorran} and Ilona {Müllerová}",
  title="Beam shaping and probe characterization in the scanning electron microscope",
  journal="ULTRAMICROSCOPY",
  year="2021",
  volume="225",
  number="1",
  pages="1--9",
  doi="10.1016/j.ultramic.2021.113268",
  issn="0304-3991",
  url="https://doi.org/10.1016/j.ultramic.2021.113268"
}

Documents

1-s2.0-S0304399121000589-main