Publication result detail

Molybdenum diselenide thin films grown by atomic layer deposition: An XPS analysis

RODRIGUEZ PEREIRA, J.; ZAZPE, R.; CHARVOT, J.; BUREŠ, F.; MACÁK, J.

Original Title

Molybdenum diselenide thin films grown by atomic layer deposition: An XPS analysis

English Title

Molybdenum diselenide thin films grown by atomic layer deposition: An XPS analysis

Type

WoS Article

Original Abstract

Molybdenum diselenide (MoSe2) thin films were deposited on annealed titanium foils by atomic layer deposition using suitable precursors. In this paper, a detailed x-ray photoelectron spectroscopy analysis of the MoSe2 film is presented. Survey spectra, Mo 3d, Se 3d, Mo 3p, Se LMM, Se 3p, C 1s, and Se 4s core level along with the valence band spectra were measured. Quantitative analysis indicates a surface composition of MoSe1.8, suggesting a deficiency of selenium on the surface.

English abstract

Molybdenum diselenide (MoSe2) thin films were deposited on annealed titanium foils by atomic layer deposition using suitable precursors. In this paper, a detailed x-ray photoelectron spectroscopy analysis of the MoSe2 film is presented. Survey spectra, Mo 3d, Se 3d, Mo 3p, Se LMM, Se 3p, C 1s, and Se 4s core level along with the valence band spectra were measured. Quantitative analysis indicates a surface composition of MoSe1.8, suggesting a deficiency of selenium on the surface.

Keywords

MoSe2; transition metal dichalcogenides; thin films; 2D material; XPS

Key words in English

MoSe2; transition metal dichalcogenides; thin films; 2D material; XPS

Authors

RODRIGUEZ PEREIRA, J.; ZAZPE, R.; CHARVOT, J.; BUREŠ, F.; MACÁK, J.

RIV year

2021

Released

01.12.2020

Publisher

AMER INST PHYSICS

Location

MELVILLE

ISBN

1055-5269

Periodical

Surface Science Spectra

Volume

27

Number

2

State

United States of America

Pages from

024006-1

Pages to

024006-8

Pages count

8

URL

https://avs.scitation.org/doi/10.1116/6.0000354