Publication result detail

Stereometric analysis of Ta2O5 thin films

SOBOLA, D.; KASPAR, P.; OULEHLA, J.; ŢĂLU, Ş.; PAPEŽ, N.

Original Title

Stereometric analysis of Ta2O5 thin films

English Title

Stereometric analysis of Ta2O5 thin films

Type

Scopus Article

Original Abstract

The purpose of this work is the study of the correlation between the thickness of tantalum pentoxide thin films and their three-dimensional (3D) micromorphology.The samples were prepared on silicon substrates by electron beam evaporation. The differences in surface structure of the processed and references samples were investigated. Compositional studies were performed by energy-dispersiveX-rayspectroscopy. Stereometric analysis was carried out on the basis of atomic force microscopy(AFM) data, for antalum pentoxide samples with 20nm, 40nm,60nm, 80nm and 100nm thicknesses. These methods are frequently used in describing experimental data of surface nanomorphology of Ta2O5. The results can be used to validate theoretical models for prediction or correlation of nanotexture surface parameters.

English abstract

The purpose of this work is the study of the correlation between the thickness of tantalum pentoxide thin films and their three-dimensional (3D) micromorphology.The samples were prepared on silicon substrates by electron beam evaporation. The differences in surface structure of the processed and references samples were investigated. Compositional studies were performed by energy-dispersiveX-rayspectroscopy. Stereometric analysis was carried out on the basis of atomic force microscopy(AFM) data, for antalum pentoxide samples with 20nm, 40nm,60nm, 80nm and 100nm thicknesses. These methods are frequently used in describing experimental data of surface nanomorphology of Ta2O5. The results can be used to validate theoretical models for prediction or correlation of nanotexture surface parameters.

Keywords

atomic force microscopy; stereometric analysis; Ta2O5, topograph

Key words in English

atomic force microscopy; stereometric analysis; Ta2O5, topograph

Authors

SOBOLA, D.; KASPAR, P.; OULEHLA, J.; ŢĂLU, Ş.; PAPEŽ, N.

RIV year

2024

Released

27.01.2020

Publisher

De Gruyter

ISBN

2083-134X

Periodical

MATERIALS SCIENCE-POLAND

Volume

1

Number

1

State

Republic of Poland

Pages from

1

Pages to

10

Pages count

10

URL

https://content.sciendo.com/view/journals/msp/ahead-of-print/article-10.2478-msp-2019-0083.xml

Full text in the Digital Library

http://hdl.handle.net/11012/193376

BibTex

@article{BUT161606,
  author="Dinara {Sobola} and Pavel {Kaspar} and Jindřich {Oulehla} and Ştefan {Ţălu} and Nikola {Papež}",
  title="Stereometric analysis of Ta2O5 thin films",
  journal="MATERIALS SCIENCE-POLAND",
  year="2020",
  volume="1",
  number="1",
  pages="1--10",
  doi="10.2478/msp-2019-0083",
  issn="2083-134X",
  url="https://content.sciendo.com/view/journals/msp/ahead-of-print/article-10.2478-msp-2019-0083.xml"
}

Documents

[2083134X - Materials Science-Poland] Stereometric analysis of Ta2O5 thin films