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Sobola D.S., Dallaev R.S., Orlova L.A.
Original Title
Role of higly oriented pyrolytic graphite in nanofabrication
English Title
Type
Conference proceedings
Original Abstract
Highly oriented pyrolytic praphite has recommended itself as a calibration material for the methods of scanning probe microscopy. However, its electrical and optical properties make it also interesting material for the preparation of nanostructures. This work describes the mechanically processed surfaces of graphite for subsequent use as substrates for depositing of thin films of semiconductor materials.
English abstract
Keywords
microscopy, topography, atomically clean surface
Key words in English
Authors
RIV year
2019
Released
06.04.2018
ISBN
978-5-00128-041-5
Book
Actual problems of road traffic education and prospects of development of the industry
Pages from
333
Pages to
336
Pages count
4
BibTex
@proceedings{BUT147118, editor="Rashid {Dallaev} and Dinara {Sobola}", title="Role of higly oriented pyrolytic graphite in nanofabrication", year="2018", pages="333--336", isbn="978-5-00128-041-5" }
Documents
Highly oriented pyrolytic graphite