Publication result detail

Difference between SE and BSE contrast in ESEM

LINHART, J.; NEDĚLA, V.

Original Title

Difference between SE and BSE contrast in ESEM

English Title

Difference between SE and BSE contrast in ESEM

Type

Paper in proceedings (conference paper)

Original Abstract

This paper deals with the study of secondary electrons (SE) and backscattered electrons (BSE) contrast in the environmental scanning electron microscopy (ESEM). The main difference of SE and BSE detection in ESEM is influenced by the used detector system. The gaseous SE detector and the scintillation BSE detector can be used. For the reason to understand differences between SE and BSE imaging, the theoretical background of generation, detection and characters of SE and BSE and mechanism of interactions between electrons and environmental conditions are described. This theory is verified by direct comparative pictures of nonconductive samples at variable pressure.

English abstract

This paper deals with the study of secondary electrons (SE) and backscattered electrons (BSE) contrast in the environmental scanning electron microscopy (ESEM). The main difference of SE and BSE detection in ESEM is influenced by the used detector system. The gaseous SE detector and the scintillation BSE detector can be used. For the reason to understand differences between SE and BSE imaging, the theoretical background of generation, detection and characters of SE and BSE and mechanism of interactions between electrons and environmental conditions are described. This theory is verified by direct comparative pictures of nonconductive samples at variable pressure.

Key words in English

secondary electrons, backscattered electrons, environmental scanning electron microscopy, observating of nonconductive samples

Authors

LINHART, J.; NEDĚLA, V.

Released

09.02.2005

Publisher

Faculty of electrical engineering and information technology, Slovak University of technology

Location

Bratislava

ISBN

80-7043-474-0

Book

Proceedings of the seventh conference for PhD students ELITECH 2005

Pages from

103

Pages count

3

URL

ÚPT AVČR Brno

BibTex

@inproceedings{BUT14417,
  author="Jan {Linhart} and Vilém {Neděla}",
  title="Difference between SE and BSE contrast in ESEM",
  booktitle="Proceedings of the seventh conference for PhD students ELITECH 2005",
  year="2005",
  pages="3",
  publisher="Faculty of electrical engineering and information technology, Slovak University of technology",
  address="Bratislava",
  isbn="80-7043-474-0",
  url="ÚPT  AVČR Brno"
}