Publication result detail

Project for Energy Storage on a Chip for MEMS

HUBÁLEK, J.; SCHNEIDER, M.; HRDÝ, R.; PRÁŠEK, J.; SCHMID, U.

Original Title

Project for Energy Storage on a Chip for MEMS

English Title

Project for Energy Storage on a Chip for MEMS

Type

Paper in proceedings outside WoS and Scopus

Original Abstract

A new project with a budget of 262 thousands Euro was motivated by the lack of micromachined energy storage solutions that can be integrated with a MEMS harvester on a chip with a specific circuitry. . These key components of the system are highly needed for autonomous microsystems and have to be integrated to enable an energy-autonomous, but efficient operation The targeted energy storage device needs to be charged very slowly from harvesters with output energies in the μWs range. As a consequence, tailored materials and technologies for the realization of thin-film capacitors compatible with CMOS technology are of utmost importance. Target capacitance value about one hundred μF/cm2, low loss factor and low leakage currents are the expected properties of these devices.

English abstract

A new project with a budget of 262 thousands Euro was motivated by the lack of micromachined energy storage solutions that can be integrated with a MEMS harvester on a chip with a specific circuitry. . These key components of the system are highly needed for autonomous microsystems and have to be integrated to enable an energy-autonomous, but efficient operation The targeted energy storage device needs to be charged very slowly from harvesters with output energies in the μWs range. As a consequence, tailored materials and technologies for the realization of thin-film capacitors compatible with CMOS technology are of utmost importance. Target capacitance value about one hundred μF/cm2, low loss factor and low leakage currents are the expected properties of these devices.

Keywords

capacitor; on-chip; dielectric; high-k; atomic layer deposition

Key words in English

capacitor; on-chip; dielectric; high-k; atomic layer deposition

Authors

HUBÁLEK, J.; SCHNEIDER, M.; HRDÝ, R.; PRÁŠEK, J.; SCHMID, U.

RIV year

2018

Released

19.09.2017

Publisher

European Passive Components Institute

Location

Lanškroun

Pages count

5

BibTex

@inproceedings{BUT143654,
  author="Jaromír {Hubálek} and Michael {Schneider} and Radim {Hrdý} and Jan {Prášek} and Ulrich {Schmid}",
  title="Project for Energy Storage on a Chip for MEMS",
  year="2017",
  pages="5",
  publisher="European Passive Components Institute",
  address="Lanškroun"
}