Publication result detail

A comparison study of boron emitter passivation by silicon oxide and a PECVD silicon nitride stack

MOJROVÁ, B.; CHU, H.; PETER, C.; PREIS, P.; LOSSEN, J.; MIHAILETCHI, V.; KOPECEK, R.

Original Title

A comparison study of boron emitter passivation by silicon oxide and a PECVD silicon nitride stack

English Title

A comparison study of boron emitter passivation by silicon oxide and a PECVD silicon nitride stack

Type

WoS Article

Original Abstract

In this study we investigated the passivation quality of boron doped emitters by varying the composition of SiO2/SiNX stack layers. For this purpose, n-PERT (passivated emitter, rear totally-diffused) solar cells with boron doped front side emitter and phosphorous doped back-surface-field (BSF), as well as symmetrical boron doped structures, were fabricated on 6-inch n-type wafers.

English abstract

In this study we investigated the passivation quality of boron doped emitters by varying the composition of SiO2/SiNX stack layers. For this purpose, n-PERT (passivated emitter, rear totally-diffused) solar cells with boron doped front side emitter and phosphorous doped back-surface-field (BSF), as well as symmetrical boron doped structures, were fabricated on 6-inch n-type wafers.

Keywords

solar cell, n-type, passivation, boron emitter, NAOS

Key words in English

solar cell, n-type, passivation, boron emitter, NAOS

Authors

MOJROVÁ, B.; CHU, H.; PETER, C.; PREIS, P.; LOSSEN, J.; MIHAILETCHI, V.; KOPECEK, R.

RIV year

2018

Released

01.09.2017

ISBN

1876-6102

Periodical

Energy Procedia

Number

124

State

Kingdom of Thailand

Pages from

288

Pages to

294

Pages count

952

BibTex

@article{BUT141006,
  author="Barbora {Mojrová} and Haifeng {Chu} and Christop {Peter} and Pirmin {Preis} and Jan {Lossen} and Valentin {Mihailetchi} and Radovan {Kopecek}",
  title="A comparison study of boron emitter passivation by silicon oxide and a PECVD silicon nitride stack",
  journal="Energy Procedia",
  year="2017",
  number="124",
  pages="288--294",
  doi="10.1016/j.egypro.2017.09.301",
  issn="1876-6102"
}