Publication result detail

Impact of the shape of the differentially pumped chamber on critical flow character

HLAVATÁ, P.; MAXA, J.; BÍLEK, M.; VYROUBAL, P.

Original Title

Impact of the shape of the differentially pumped chamber on critical flow character

English Title

Impact of the shape of the differentially pumped chamber on critical flow character

Type

Paper in proceedings outside WoS and Scopus

Original Abstract

The article deals with the impact of the shape of the differential pumped chamber of the Environmental electron microscope on resultant value of average Normalized density number on the path of the primary electron beam which has directly proportional influence on the dispersion of this beam and thereby influence on sharpness resulting image. Analysis were made using finite volume method in Ansys Fluent system with the respect to critical flow created behind the aperture which separates differential pumped chamber from specimen chamber.

English abstract

The article deals with the impact of the shape of the differential pumped chamber of the Environmental electron microscope on resultant value of average Normalized density number on the path of the primary electron beam which has directly proportional influence on the dispersion of this beam and thereby influence on sharpness resulting image. Analysis were made using finite volume method in Ansys Fluent system with the respect to critical flow created behind the aperture which separates differential pumped chamber from specimen chamber.

Keywords

ANSYS Fluent, Electron microscopy, Environmental scanning electron microscope, Dr. Danilatos, Monte Carlo

Key words in English

ANSYS Fluent, Electron microscopy, Environmental scanning electron microscope, Dr. Danilatos, Monte Carlo

Authors

HLAVATÁ, P.; MAXA, J.; BÍLEK, M.; VYROUBAL, P.

RIV year

2018

Released

11.09.2017

Publisher

Brno University of Technology

Location

Brno

ISBN

978-80-214-5529-0

Book

Advanced Batteries Accumulators and Fuel Cells - 18th ABAF

Edition

18

Pages from

161

Pages to

163

Pages count

3

BibTex

@inproceedings{BUT140295,
  author="Pavla {Šabacká} and Jiří {Maxa} and Michal {Bílek} and Petr {Vyroubal}",
  title="Impact of the shape of the differentially pumped chamber on critical flow
character",
  booktitle="Advanced Batteries Accumulators and Fuel Cells - 18th ABAF",
  year="2017",
  series="18",
  number="1",
  pages="161--163",
  publisher="Brno University of Technology",
  address="Brno",
  isbn="978-80-214-5529-0"
}