Publication result detail

Ellipsometry of surface layers on a 1-kg sphere from natural silicon

KLENOVSKÝ, P.; ZŮDA, J.; KLAPETEK, P.; HUMLÍČEK, J.

Original Title

Ellipsometry of surface layers on a 1-kg sphere from natural silicon

English Title

Ellipsometry of surface layers on a 1-kg sphere from natural silicon

Type

WoS Article

Original Abstract

We have investigated surface layers on a monocrystalline float-zone, n-type (2400–2990 cm) spherewith the diameter of 93.6004 mm. Ellipsometric spectra in the visible–ultraviolet range reveals the presence of thin layers of amorphous Si as well as oxide overlayer. We have also prepared a series of flat Si samples, polished using slurries with 1–6 m grits; the overlayers were examined by mid–infrared ellipsometry, including the range of polar vibrations of the Si-O bonds. AFM measurements on the sphere were used to test the models of its surface.

English abstract

We have investigated surface layers on a monocrystalline float-zone, n-type (2400–2990 cm) spherewith the diameter of 93.6004 mm. Ellipsometric spectra in the visible–ultraviolet range reveals the presence of thin layers of amorphous Si as well as oxide overlayer. We have also prepared a series of flat Si samples, polished using slurries with 1–6 m grits; the overlayers were examined by mid–infrared ellipsometry, including the range of polar vibrations of the Si-O bonds. AFM measurements on the sphere were used to test the models of its surface.

Keywords

Silicon Surface layers; Ellipsometry; 1-kg mass standard

Key words in English

Silicon Surface layers; Ellipsometry; 1-kg mass standard

Authors

KLENOVSKÝ, P.; ZŮDA, J.; KLAPETEK, P.; HUMLÍČEK, J.

RIV year

2018

Released

01.11.2017

ISBN

0169-4332

Periodical

APPLIED SURFACE SCIENCE

Volume

421

Number

1

State

Kingdom of the Netherlands

Pages from

542

Pages to

546

Pages count

5

BibTex

@article{BUT134544,
  author="Petr {Klenovský} and Jaroslav {Zůda} and Petr {Klapetek} and Josef {Humlíček}",
  title="Ellipsometry of surface layers on a 1-kg sphere from natural silicon",
  journal="APPLIED SURFACE SCIENCE",
  year="2017",
  volume="421",
  number="1",
  pages="542--546",
  doi="10.1016/j.apsusc.2016.08.135",
  issn="0169-4332"
}