Publication result detail

Vliv pracovních podmínek na zesílení ionizačního detektoru v ESEM

ČERNOCH, P.

Original Title

Vliv pracovních podmínek na zesílení ionizačního detektoru v ESEM

English Title

The influence of working conditions on the ionization detector amplification in the ESEM

Type

Paper in proceedings (conference paper)

Original Abstract

This paper deals with the influence of working conditions on the ionization detector amplification in the environmental scanning electron microscope (ESEM). This microscope is a new form of the scanning electron microscope, in which the optical column is vacuum separated from the specimen chamber, where can be pressure in the range from 102 to 103 Pa. Main advantages of this microscopy are following: There is no electrical charging of insulating specimens and it is possible to observe wet specimens.

English abstract

This paper deals with the influence of working conditions on the ionization detector amplification in the environmental scanning electron microscope (ESEM). This microscope is a new form of the scanning electron microscope, in which the optical column is vacuum separated from the specimen chamber, where can be pressure in the range from 102 to 103 Pa. Main advantages of this microscopy are following: There is no electrical charging of insulating specimens and it is possible to observe wet specimens.

Keywords

ionizační detektor, ESEM

Key words in English

ionization detektor, ESEM

Authors

ČERNOCH, P.

Released

15.10.2003

Publisher

Západočeská univerzita v Plzni

Location

Plzeň

ISBN

80-7082-993

Book

Elektrotechnika a informatika 2003, část Elektrotechnika

Volume

4

Pages from

8

Pages count

4

BibTex

@inproceedings{BUT12861,
  author="Pavel {Černoch}",
  title="Vliv pracovních podmínek na zesílení ionizačního detektoru v ESEM",
  booktitle="Elektrotechnika a informatika 2003, část Elektrotechnika",
  year="2003",
  volume="4",
  number="1",
  pages="4",
  publisher="Západočeská univerzita v Plzni",
  address="Plzeň",
  isbn="80-7082-993"
}