Publication result detail

Influence of Saturation of Magnetic Lens Material on Fields of Deflectors and Parasitic Fields

ZLÁMAL, J.; LENCOVÁ, B.

Original Title

Influence of Saturation of Magnetic Lens Material on Fields of Deflectors and Parasitic Fields

English Title

Influence of Saturation of Magnetic Lens Material on Fields of Deflectors and Parasitic Fields

Type

Scopus Article

Original Abstract

In the connection with the calculation of parasitic fields of highly saturated lens in emerged the problem of calculation of the field of deflectors situated next to saturated magnetic materials. Up to date the deflection fields were studied only near rotationally symmetric materials with constant permeability. However, for the deflectors in saturated magnetic lenses the relative permeability is very inhomogeneous and near pole piece tips it is close to 1. We have therefore modified the computation of deflection fields in saturated lenses with EOD program to include the real value of permeability of magnetic materials. We can also display the distribution of permeability in the magnetic circuit of the lens to understand the changes in the field distribution in deflection or parasitic fields and to understand the saturation effects in magnetic lenses.

English abstract

In the connection with the calculation of parasitic fields of highly saturated lens in emerged the problem of calculation of the field of deflectors situated next to saturated magnetic materials. Up to date the deflection fields were studied only near rotationally symmetric materials with constant permeability. However, for the deflectors in saturated magnetic lenses the relative permeability is very inhomogeneous and near pole piece tips it is close to 1. We have therefore modified the computation of deflection fields in saturated lenses with EOD program to include the real value of permeability of magnetic materials. We can also display the distribution of permeability in the magnetic circuit of the lens to understand the changes in the field distribution in deflection or parasitic fields and to understand the saturation effects in magnetic lenses.

Keywords

Magnetic Lens; Electron Optics; EOD

Key words in English

Magnetic Lens; Electron Optics; EOD

Authors

ZLÁMAL, J.; LENCOVÁ, B.

RIV year

2016

Released

30.06.2015

ISBN

1431-9276

Periodical

MICROSCOPY AND MICROANALYSIS

Volume

21

Number

S4

State

United States of America

Pages from

188

Pages to

193

Pages count

6

BibTex

@article{BUT119196,
  author="Jakub {Zlámal} and Bohumila {Lencová}",
  title="Influence of Saturation of Magnetic Lens Material on Fields of Deflectors and Parasitic Fields",
  journal="MICROSCOPY AND MICROANALYSIS",
  year="2015",
  volume="21",
  number="S4",
  pages="188--193",
  doi="10.1017/S1431927615013355",
  issn="1431-9276"
}