Publication result detail

Electron beam lithography of graphene Hall-bar for micro-contacting

HRABOVSKÝ, M.

Original Title

Electron beam lithography of graphene Hall-bar for micro-contacting

English Title

Electron beam lithography of graphene Hall-bar for micro-contacting

Type

Conference proceedings

Original Abstract

Overview of the preperation and shaping of graphene into Hall-bar like structures for nanosensoric applications.

English abstract

Overview of the preperation and shaping of graphene into Hall-bar like structures for nanosensoric applications.

Keywords

Grapehen, Hall-bar, EBL, plasma etching, HSQ, PMMA

Key words in English

Grapehen, Hall-bar, EBL, plasma etching, HSQ, PMMA

Authors

HRABOVSKÝ, M.

RIV year

2016

Released

23.04.2015

Publisher

MUNI PRESS

Location

Brno

ISBN

978-80-210-7825-3

Book

Ceitec PHD Retreat

Edition

1.

Pages from

95

Pages to

95

Pages count

1

BibTex

@proceedings{BUT115736,
  editor="Miloš {Hrabovský}",
  title="Electron beam lithography of graphene Hall-bar for micro-contacting",
  year="2015",
  series="1.",
  number="1",
  pages="95--95",
  publisher="MUNI PRESS",
  address="Brno",
  isbn="978-80-210-7825-3"
}