Publication result detail

Nonlitographic Nanostructured Film Fabrication

HUBÁLEK, J.

Original Title

Nonlitographic Nanostructured Film Fabrication

English Title

Nonlitographic Nanostructured Film Fabrication

Type

Paper in proceedings (conference paper)

Original Abstract

The nanomachining techniques in the field of thin films are described. The presented techniques make possible fabrication of nanostructures without utilization of high-resolution electron-beam lithography. Self-ordering of aluminium during anodization is employed in nanomachining. Nanomachinig is presented as a low cost technology for microelectronic industry. Results of nanoporous ceramic fabrication focused on the importance of electropolishing for obtaining the requested sizes of a nanostructure. A method of preparation of the nanomachined ceramic used as a template is discussed. The nanorods (nanowires) were created. Nanostructures were scanned by the electron-beam microscope (SEM).

English abstract

The nanomachining techniques in the field of thin films are described. The presented techniques make possible fabrication of nanostructures without utilization of high-resolution electron-beam lithography. Self-ordering of aluminium during anodization is employed in nanomachining. Nanomachinig is presented as a low cost technology for microelectronic industry. Results of nanoporous ceramic fabrication focused on the importance of electropolishing for obtaining the requested sizes of a nanostructure. A method of preparation of the nanomachined ceramic used as a template is discussed. The nanorods (nanowires) were created. Nanostructures were scanned by the electron-beam microscope (SEM).

Keywords

Self-ordering, nanopores, nanorods, nanowires

Key words in English

Self-ordering, nanopores, nanorods, nanowires

Authors

HUBÁLEK, J.

Released

16.06.2004

Publisher

IMAPS CZ&SK chapter

Location

Lanškroun

ISBN

80-239-2835-X

Book

3rd European Microelectrinics and Packaging Symposium

Volume

první

Pages from

495

Pages count

6

BibTex

@inproceedings{BUT11522,
  author="Jaromír {Hubálek}",
  title="Nonlitographic Nanostructured Film Fabrication",
  booktitle="3rd European Microelectrinics and Packaging Symposium",
  year="2004",
  volume="první",
  pages="6",
  publisher="IMAPS CZ&SK chapter",
  address="Lanškroun",
  isbn="80-239-2835-X"
}