Publication result detail

Mechanical and electrical properties of evaporated thin layers

VEJMOLA, T.; YAHYA, D.; ŠANDERA, J.

Original Title

Mechanical and electrical properties of evaporated thin layers

English Title

Mechanical and electrical properties of evaporated thin layers

Type

Peer-reviewed article not indexed in WoS or Scopus

Original Abstract

The study deals with the vacuum evaporation technique of thin layers, considering different process parameters and their influence on electrical properties. Parameters, such as temperature, different substrate types, substrate vibrations, etc., are considered. The effects of the process parameters on the coating structure are observed. The temperature affects the coating quality and stability [1] [2]. Regarding electrical properties, the surface resistivity is measured by four-point method, whereas the influence of process parameters on the surface resistivity is determined as well.

English abstract

The study deals with the vacuum evaporation technique of thin layers, considering different process parameters and their influence on electrical properties. Parameters, such as temperature, different substrate types, substrate vibrations, etc., are considered. The effects of the process parameters on the coating structure are observed. The temperature affects the coating quality and stability [1] [2]. Regarding electrical properties, the surface resistivity is measured by four-point method, whereas the influence of process parameters on the surface resistivity is determined as well.

Keywords

thin layers vacuum evaporation mechanical properties electrical properties electrical measurements

Key words in English

thin layers vacuum evaporation mechanical properties electrical properties electrical measurements

Authors

VEJMOLA, T.; YAHYA, D.; ŠANDERA, J.

Released

05.12.2014

ISBN

1802-4564

Periodical

ElectroScope - http://www.electroscope.zcu.cz

Volume

2014

Number

3

State

Czech Republic

Pages from

1

Pages to

4

Pages count

4

URL

https://otik.uk.zcu.cz/bitstream/handle/11025/11824/Vejmola.pdf?sequence=1

BibTex

@article{BUT114331,
  author="Tomáš {Vejmola} and Doaa {W. F. Yahya} and Josef {Šandera}",
  title="Mechanical and electrical properties of evaporated thin layers",
  journal="ElectroScope - http://www.electroscope.zcu.cz",
  year="2014",
  volume="2014",
  number="3",
  pages="1--4",
  issn="1802-4564",
  url="https://otik.uk.zcu.cz/bitstream/handle/11025/11824/Vejmola.pdf?sequence=1"
}