Publication result detail

Thermal conductivity analysis of delaminated thin films by scanning thermal microscopy

MARTINEK, J.; KLAPETEK, P.; CIMRMAN, R.; VALTR, M.

Original Title

Thermal conductivity analysis of delaminated thin films by scanning thermal microscopy

English Title

Thermal conductivity analysis of delaminated thin films by scanning thermal microscopy

Type

WoS Article

Original Abstract

Scanning thermal microscopy (SThM) is a scanning probe microscopy technique for mapping temperature and thermal properties of solid surfaces with very high resolution. Absolute determination of thermal conductivity using SThM, however, is still problematic due to the complex nature of the heat exchange between the probe and sample. In this paper we present a method for thin film thermal conductivity determination based on the use of thin film defects - delaminations by simulation of the measurement process using finite element method.

English abstract

Scanning thermal microscopy (SThM) is a scanning probe microscopy technique for mapping temperature and thermal properties of solid surfaces with very high resolution. Absolute determination of thermal conductivity using SThM, however, is still problematic due to the complex nature of the heat exchange between the probe and sample. In this paper we present a method for thin film thermal conductivity determination based on the use of thin film defects - delaminations by simulation of the measurement process using finite element method.

Keywords

Scanning thermal microscopy, thin films, thermal conductivity

Key words in English

Scanning thermal microscopy, thin films, thermal conductivity

Authors

MARTINEK, J.; KLAPETEK, P.; CIMRMAN, R.; VALTR, M.

RIV year

2015

Released

05.03.2014

ISBN

0957-0233

Periodical

Measurement Science and Technology

Volume

25

Number

4

State

United Kingdom of Great Britain and Northern Ireland

Pages from

1

Pages to

12

Pages count

12

BibTex

@article{BUT112003,
  author="Jan {Martinek} and Petr {Klapetek} and Robert {Cimrman} and Miroslav {Valtr}",
  title="Thermal conductivity analysis of delaminated thin films by scanning thermal microscopy",
  journal="Measurement Science and Technology",
  year="2014",
  volume="25",
  number="4",
  pages="1--12",
  doi="10.1088/0957-0233/25/4/044022",
  issn="0957-0233"
}