Publication result detail

Deposition and in situ characterization of ultra-thin films

VOBORNÝ, S., KOLÍBAL, M., MACH, J., ČECHAL, J., BÁBOR, P., PRŮŠA, S., SPOUSTA, J., ŠIKOLA, T.

Original Title

Deposition and in situ characterization of ultra-thin films

English Title

Deposition and in situ characterization of ultra-thin films

Type

Paper in proceedings (conference paper)

Original Abstract

Deposition of ultra-thin GaN layers and their analysis using XPS, SIMS, TOF-LEIS.

English abstract

Deposition of ultra-thin GaN layers and their analysis using XPS, SIMS, TOF-LEIS.

Key words in English

GaN, XPS, thin films

Authors

VOBORNÝ, S., KOLÍBAL, M., MACH, J., ČECHAL, J., BÁBOR, P., PRŮŠA, S., SPOUSTA, J., ŠIKOLA, T.

RIV year

2011

Released

23.06.2003

Publisher

EVC

Location

Berlin

Book

EVC'03 Abstracts

Pages from

45

Pages count

2

BibTex

@inproceedings{BUT11053,
  author="Stanislav {Voborný} and Miroslav {Kolíbal} and Jindřich {Mach} and Jan {Čechal} and Petr {Bábor} and Stanislav {Průša} and Jiří {Spousta} and Tomáš {Šikola}",
  title="Deposition and in situ characterization of ultra-thin films",
  booktitle="EVC'03 Abstracts",
  year="2003",
  pages="2",
  publisher="EVC",
  address="Berlin"
}