Publication result detail

APPLICATION OF FEM TO ESTIMATE OF MECHANICAL PROPERTIES OF THIN LAYERS

PETRÁČKOVÁ, K.; NÁHLÍK, L.; TRUHLÁŘ, M.; KUBĚNA, I.; HUTAŘ, P.

Original Title

APPLICATION OF FEM TO ESTIMATE OF MECHANICAL PROPERTIES OF THIN LAYERS

English Title

APPLICATION OF FEM TO ESTIMATE OF MECHANICAL PROPERTIES OF THIN LAYERS

Type

Abstract

Original Abstract

This paper describes a new method for testing of thin layers, so-called microcompression test. As an example determination of Al thin film properties deposited on Si substrate is introduced in the paper. Experimentally measured data obtained on (micro) pillars need correction to obtain undistorted material properties of Al thin film. A necessary correction using finite element modeling (FEM) is suggested in the paper. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties.

English abstract

This paper describes a new method for testing of thin layers, so-called microcompression test. As an example determination of Al thin film properties deposited on Si substrate is introduced in the paper. Experimentally measured data obtained on (micro) pillars need correction to obtain undistorted material properties of Al thin film. A necessary correction using finite element modeling (FEM) is suggested in the paper. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties.

Keywords

Microcompresion test, FEM

Key words in English

Microcompresion test, FEM

Authors

PETRÁČKOVÁ, K.; NÁHLÍK, L.; TRUHLÁŘ, M.; KUBĚNA, I.; HUTAŘ, P.

RIV year

2014

Released

15.04.2013

Book

15th International Conference, APPLIED MECHANICS 2013

BibTex

@misc{BUT104851,
  author="Klára {Petráčková} and Luboš {Náhlík} and Michal {Truhlář} and Ivo {Kuběna} and Pavel {Hutař}",
  title="APPLICATION OF FEM TO ESTIMATE OF MECHANICAL PROPERTIES OF THIN LAYERS",
  booktitle="15th International Conference, APPLIED MECHANICS 2013",
  year="2013",
  note="Abstract"
}