Publication result detail

Calculation of the performance of magnetic lenses with limited machining precision

SHÁNĚL, O.; ZLÁMAL, J.; ORAL, M.

Original Title

Calculation of the performance of magnetic lenses with limited machining precision

English Title

Calculation of the performance of magnetic lenses with limited machining precision

Type

WoS Article

Original Abstract

To meet a required STEM resolution, the mechanical precision of the pole pieces of a magnetic lens needs to be determined. A tolerancing plugin in the EOD software is used to determine a configuration which both meets the optical specifications and is cost effective under the constraints of current manufacturing technologies together with a suitable combination of correction elements.

English abstract

To meet a required STEM resolution, the mechanical precision of the pole pieces of a magnetic lens needs to be determined. A tolerancing plugin in the EOD software is used to determine a configuration which both meets the optical specifications and is cost effective under the constraints of current manufacturing technologies together with a suitable combination of correction elements.

Keywords

Tolerance analysis; Perturbed geometry; Spot size; Aberrations; Saturated magnetic lens

Key words in English

Tolerance analysis; Perturbed geometry; Spot size; Aberrations; Saturated magnetic lens

Authors

SHÁNĚL, O.; ZLÁMAL, J.; ORAL, M.

RIV year

2015

Released

01.02.2014

ISBN

0304-3991

Periodical

ULTRAMICROSCOPY

Volume

137

Number

1

State

Kingdom of the Netherlands

Pages from

1

Pages to

6

Pages count

6

BibTex

@article{BUT103136,
  author="Ondřej {Sháněl} and Jakub {Zlámal} and Martin {Oral}",
  title="Calculation of the performance of magnetic lenses with limited machining precision",
  journal="ULTRAMICROSCOPY",
  year="2014",
  volume="137",
  number="1",
  pages="1--6",
  doi="10.1016/j.ultramic.2013.10.004",
  issn="0304-3991"
}