The formation of Self-organized 3-d Arrays of Semiconductor Metal-oxide Nanocolumns for Advanced Sensor Applications

The formation of Self-organized 3-d Arrays of Semiconductor Metal-oxide Nanocolumns for Advanced Sensor Applications

Conference proceedings

In this work electrochemical anodizing has been employed to synthesize, for the first time, a three-dimensional nanostructured column-like metal-oxide semiconductor film in which a change in the conductivity along the columns, assembled between the two parallel metal electrodes, is the controlling factor during chemisorption reactions when a gas penetrates such a film. To demonstrate the technology capability, several types of unique niobium-oxide-nanocolumn arrays have been synthesized via multistep anodic processing of an Al/Nb thin-film bilayer sputter-deposited onto oxidized Si substrates and additionally tailoring their parameters by combining chemical dissolution and high-temperature annealing. The films formation-structure-property relationship has been studied in pursuit of altering the film properties and discovering new functionalities for potential application to advanced micro and nanosensors

In this work electrochemical anodizing has been employed to synthesize, for the first time, a three-dimensional nanostructured column-like metal-oxide semiconductor film in which a change in the conductivity along the columns, assembled between the two parallel metal electrodes, is the controlling factor during chemisorption reactions when a gas penetrates such a film. To demonstrate the technology capability, several types of unique niobium-oxide-nanocolumn arrays have been synthesized via multistep anodic processing of an Al/Nb thin-film bilayer sputter-deposited onto oxidized Si substrates and additionally tailoring their parameters by combining chemical dissolution and high-temperature annealing. The films formation-structure-property relationship has been studied in pursuit of altering the film properties and discovering new functionalities for potential application to advanced micro and nanosensors

3-D nanostructures, self-organized film, electrochemical anodizing, anodic oxide films, porous anodic alumina, niobium oxide, functional properties, gas sensor

3-D nanostructures, self-organized film, electrochemical anodizing, anodic oxide films, porous anodic alumina, niobium oxide, functional properties, gas sensor

MOZALEV, A.; BENDOVA, M.; HRDY, R.; PYTLICEK, Z.; HUBALEK, J.

2014

02.05.2013

University of Žilina, Slovakia

978-80-554-0689-3

Proceedings of the International Conference on Advances in Electronic and Photonic Technologies

D. Pudiš

7

10

4