Abstract in English Data acquired in High-Speed Scanning Probe Microscopy (HS-SPM) are sampled along unusual and from a practical standpoint irregular space-time trajectories. Artefacts in the data, which are common, are difficult to deal with. Current data processing techniques, software tools and even theory are inadequate, in particular for quantitative analysis and nanometrology. This project aims to advance theoretical concepts, methodology, implementation and hardware tools for quantitative data treatment in HS-SPM. Measuring all degrees of freedom in the scanner motion, working with full raw data, including the acquisition time of every point, and using optimized scan paths, will enable improvements in both imaging speed and data accuracy. The developed method will be applied to study the fast time evolution studies of phase changing materials. However, they will be general and applicable also to other research fields where HS-SPM in used, e.g. in life sciences.

Keywords
SPM;high-speed AFM;data processing

26-23708S

English

Nečas David, Mgr., Ph.D. - principal person responsible

Plasma Technologies for Materials
- responsible department (27.3.2025 - not assigned)
Plasma Technologies for Materials
- beneficiary (27.3.2025 - not assigned)

Responsibility: Nečas David, Mgr., Ph.D.