This project is financed with state support from the Technology Agency of the Czech Republic and the Ministry of Industry and Trade of the Czech Republic within the TREND Programme.
www.tacr.cz
Research useful for society.

Project detail

Advanced coating technology for the production of uniform layers on curved optical elements for the semiconductor industry

Duration: 1.1.2025 — 31.12.2027

Funding resources

Technologická agentura ČR - 12. veřejná soutěž - Program na podporu průmyslového výzkumu a experimentálního vývoje TREND, PP1

On the project

Projekt se zabývá VaV aktivitami vedoucími ke zlepšení uniformity deponovaných tenkých vrstev na substráty (čočky) s velkou křivostí sférických ploch ve společnosti Meopta

Description in English
The project deals with R&D activities to improve the uniformity of deposited thin films on substrates (lenses) with high curvature spherical surfaces at Meopta

Keywords
optické vrstevy, zakřivené povrchy, polovodičový průmysl, simulace depozičních procesů

Key words in English
optical layers, curved surfaces, semiconductor industry, simulation of deposition processes

Mark

FW12010394

Default language

Czech

People responsible

Bábor Petr, doc. Ing., Ph.D. - principal person responsible
Kalousek Radek, doc. Ing., Ph.D. - fellow researcher
Lipovský Oto, Ing. - fellow researcher
Potoček Michal, Ing., Ph.D. - fellow researcher
Zlámal Jakub, doc. Ing., Ph.D. - fellow researcher

Units

Fabrication and Characteris. of Nanostr.
- responsible department (8.8.2024 - not assigned)
Fabrication and Characteris. of Nanostr.
- beneficiary (8.8.2024 - not assigned)

Responsibility: Bábor Petr, doc. Ing., Ph.D.