Project detail

Correlative probe and electron microscopy imaging of threading dislocations in III-nitrides

Duration: 01.03.2017 — 28.02.2018

Funding resources

Brno University of Technology - Vnitřní projekty VUT

- whole funder (2017-01-01 - 2018-12-31)

On the project

Correlative imaging is an emerging paradigm which allows simultaneous capture of surface signals from two different probes - typically surface topography from AFM and the complementary signal from SEM. The main obstacle is the widely disparate resolution of both methods (approx. 1 nm for AFM but 100 nm for cathodoluminescence imaging). In this project, we will develop a new approach to correlative imaging of threading dislocations in III-nitride semiconductors, which will provide detailed information about the structure and optical activity of these defects.

Mark

STI-J-17-4388

Default language

Czech

People responsible

Gröger Roman, doc. Ing., Ph.D. et Ph.D. - fellow researcher
Vacek Petr, Ing., Ph.D. - principal person responsible

Units

Central European Institute of Technology BUT
- (2017-01-01 - 2017-12-31)

Results

VACEK, P.; KOSTELNÍK, P.; GRÖGER, R. Correlation of Structure and EBIC Contrast from Threading Dislocations in AlN/Si Films. PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2019, vol. 256, no. 11, p. 1900279-1900279. ISSN: 0370-1972.
Detail

Responsibility: Vacek Petr, Ing., Ph.D.