Project detail

In-situ analýza tenkých vrstev PMPSi pomocí spektroskopické elipsometrie a XPS

Duration: 01.01.2006 — 31.12.2009

Funding resources

Brno University of Technology - Vnitřní projekty VUT

- whole funder (2006-01-01 - 2006-12-31)

Mark

BD 1363007

Default language

Czech

People responsible

Kolíbalová Eva, Ing., Ph.D. - principal person responsible

Responsibility: Kolíbalová Eva, Ing., Ph.D.