Course detail

Diagnostics and Testing

FEKT-MPA-DMEAcad. year: 2023/2024

Diagnostic methods for determining properties and parameters of electrical insulating materials and systems. Microscopic, spectroscopic and diffractometric diagnostic methods, physical principles and applications. Diagnostic methods for determining the properties of semiconductor wafers and structures, contamination and defects in semiconductor materials. Processing and evaluation of measured data. Translated with (free version) 

Language of instruction


Number of ECTS credits


Mode of study

Not applicable.

Entry knowledge

Knowledge of electrical materials on the level of the bachelor's course Diagnostics and Testing.

Rules for evaluation and completion of the course

up to 40 points during the semester (20 points from laboratory seminars and 20 points from individual work and its presentation)
up to 60 points from written final exam
Final exam is focused on verification of knowledge and orientation in the field of diagnostics methods and organization of testing.
Obligatory participation in teaching.


The aim of the course is to acquaint students with theory of diagnostic methods used for evaluation of properties and parameters of electroinsulating and semiconductor materials and structures, with theoretical principles of methods based on exploitation of electron beam for evaluation of structure and composition of material systems as well as with principles of evaluation of measured data.
At the end of the course, the student will be able to:
- describe theoretical basis of electrical and physical diagnostics methods used for determination of properties, parameters and composition of electrical materials,
- explain general base of processing and evaluating of measured data,
- describe organization of testing and certification in Czech Republic and in European Union,
- define legislative requirements in the field of metrology,
- be knowledgeable in diagnostics methods, plan usage of suitable method for concrete application, including of simple interpretation of obtained information.

Study aids

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

OĆonnor, D.J. and others: Surface Analysis Methods in Materials Science. Springer Berlin 2003. ISBN0931-5195 (EN)
Reimer,L.:Scanning electron microscopy,Springer Verlag Berlin,2005 (EN)
Van Zant, P.: Microchip fabrication. Fourth edition. McGraw-Hill Publication. New York, 2000. (EN)
Ifan Hughes, Thomas Hase; Measurements and their Uncertainties: A practical guide to modern error analysis; Oxford University Press; 2010 (EN)
C. J. Gilmore, J. A. Kaduk and H. Schenk: International Tables for Crystallography Volume H: Powder diffraction, 2019 (EN)

Recommended reading

Not applicable.

Classification of course in study plans

  • Programme MPC-EVM Master's, any year of study, winter semester, compulsory-optional
  • Programme MPA-EEN Master's, 2. year of study, winter semester, compulsory-optional

Type of course unit



26 hours, optionally

Teacher / Lecturer

Laboratory exercise

39 hours, compulsory

Teacher / Lecturer