Course detail
Microsensors and Microelectromechanical Systems
FEKT-MPA-MMSAcad. year: 2023/2024
Introduction into microsensors, general clasification and parameters, and microelectromechanical systems (MEMS). Fundamentals of microelectronic technologies and MEMS technology. Fundamentals of phenomena in materials including semiconductors and their exploiting in sensors. Resistive, capacitive and inductance microsensors including MEMS-based solution (position, pressure, temperature, acceleration, ....). Magnetoelectric sensors and Hall's probes. Generating sensors based on thermoelectric, piezoelectric, and inductive principle. Optical and CCD sensors. Light emission sensor generators. Chemical and biochemical sensors (conductometric, pH sensors, lambda probe, enzymatic sensors, ...). New trends in microsensors and MEMS.
Language of instruction
Number of ECTS credits
Mode of study
Guarantor
Department
Entry knowledge
Work in the laboratory is subject to the valid qualification of the "instructed worker" according to the Decree. 50/1978 Coll., Which students must acquire before commencement of teaching. Information on this qualification can be found in the Dean's Guidance on Safety Regulations.
Rules for evaluation and completion of the course
The content and forms of instruction in the evaluated course are specified by a regulation issued by the lecturer responsible for the course and updated for every academic year.
Aims
The student is able to:
- explain the basic properties of sensors
- explain the difference between the sensor and the converter of quantity (sensing element)
- explain principles of microelectromechanical systems,
- describe the basic principles of non-electric quantities
- describe technologies for microsensor fabrication
- explain the difference between a physical, a chemical sensor and a biosensor
Study aids
Prerequisites and corequisites
Basic literature
Recommended reading
Julian W. Gardner; Microsensors : Principles and Applications. John Wiley & Sons Inc., 2020, ISBN 0470850434 (EN)
Classification of course in study plans