Course detail

Microsensors and Microelectromechanical Systems

FEKT-BKC-MMSAcad. year: 2023/2024

Introduction into microsensors, general calsification and parameters, and microelectromechanical systems (MEMS). Fundamentals of microelectronic technologies and MEMS technology. Fundamentals of phenomenas in materials including semiconductors and their exploiting in sensors. Resistive, capacitive and inductance microsensors including MEMS solution (position, pressure, temperature, acceleration, ....). Magnetoelectric sensors and Hall's probes. Generating sensors based on thermoelectric, piezoelectric, and inductive principle. Optical and CCD sensors. Light emission sensor generators. Chemical and biochemical sensors (conductometric, pH sensors, lambda probe, enzymatic sensors, ...). New trends in microsensors and MEMS.

Language of instruction


Number of ECTS credits


Mode of study

Not applicable.

Entry knowledge

The subject knowledge on the secondary school level is required.

Rules for evaluation and completion of the course

Requirements for completion of a course are specified by a regulation issued by the lecturer responsible for the course and updated for every.
The content and forms of instruction in the evaluated course are specified by a regulation issued by the lecturer responsible for the course and updated for every academic year.


Target of the course is to present theory, principles and design of microsensors and microelectromechanical systems (MEMS), to train how to design microsystems and their application.
Fundamental knowledge of theory and earning practical skills how to design microelectromechanical systems, microsensors and to apply methods of non-electrical quantities measurement, methodology and evaluation.

Study aids

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

HUBÁLEK, J.; DRBOHLAVOVÁ, J.; PRÁŠEK, J.; BUŠINOVÁ, P.; BENDOVÁ, M. Mikrosenzory a mikroelektromechanické systémy. Brno: 2012. (CS)
HUBÁLEK, J.; PRÁŠEK, J.; PEKÁRKOVÁ, J; BENDOVÁ, M.; DRBOHLAVOVÁ, J.; MAJZLÍKOVÁ, P. Microsensors and Microelectromechanical Systems. Brno: 2015. (EN)

Recommended reading

Julian W. Gardner; Microsensors : Principles and Applications. John Wiley & Sons Inc., 2020, ISBN 0470850434 (EN)
Czichos Horst; Measurement, Testing and Sensor Technology: Fundamentals and Application to Materials and Technical Systems. Springer International Publishing AG, 2018, ISBN 9783319763842 (EN)


Classification of course in study plans

  • Programme BKC-MET Bachelor's, 3. year of study, summer semester, compulsory-optional

Type of course unit



26 hours, optionally

Teacher / Lecturer


Introduction into microsensors and micromechanical systems. General parameters, classification, characteristics.
Fundaments of microelectronic technologies. Classification of microelectronic technologies, technologies of thin and thick films, fundaments of semiconductor technologies.
Introduction into semiconductors and their exploiting in sensorics.
Resistive sensors. General properties, model of electric schematic diagram, classification of resistive sensors, essential description of microsensors (gauges, thermistors, posistors, ...).
Capacitive microsensors. General parameters, model of electric schematic diagram, classification of capacitive sensors.
Hall sensors. Physical principle, materials for Hall sensors.
Piezoelectric sensors. Physical principle, materials for piezoelectric sensors, design and application.
CCD sensors. Physical principle, General parameters and application.
Light emission sensor generators.
Chemical sensors. Physical principle. General parameters and application. Classification of chemical sensors, description (conductometric, pH sensors, ...).
Special types of sensors.
Micromechanical systems. General parameters and application. Manufacturing of micromechanical systems.
New trends in microsensorics and micromechanical systems.

Laboratory exercise

26 hours, compulsory

Teacher / Lecturer


Introduction, administration and organisation, safety at work.
Practical fundamental of microelectronic technology, Laboratory project.
Measurement of position.
Measurement of temperature.
Measurement of pressure.
Measurement of vibrations and inclination.
Measurement of light intensity.
Measurement of conductivity and pH.
Measurement of chemicals in liquids.
Measurement of gases.
Special sensors.
Consultations by lab project.
Free topic.
Examen test.