Course detail

Microsensors and Microelectromechanical Systems

FEKT-MPA-MMSAcad. year: 2021/2022

Introduction into microsensors, general clasification and parameters, and microelectromechanical systems (MEMS). Fundamentals of microelectronic technologies and MEMS technology. Fundamentals of phenomena in materials including semiconductors and their exploiting in sensors. Resistive, capacitive and inductance microsensors including MEMS-based solution (position, pressure, temperature, acceleration, ....). Magnetoelectric sensors and Hall's probes. Generating sensors based on thermoelectric, piezoelectric, and inductive principle. Optical and CCD sensors. Light emission sensor generators. Chemical and biochemical sensors (conductometric, pH sensors, lambda probe, enzymatic sensors, ...). New trends in microsensors and MEMS.

Language of instruction


Number of ECTS credits


Mode of study

Not applicable.

Learning outcomes of the course unit

The student is able to:
- explain the basic properties of sensors
- explain the difference between the sensor and the converter of quantity (sensing element)
- explain principles of microelectromechanical systems,
- describe the basic principles of non-electric quantities
- describe technologies for microsensor fabrication
- explain the difference between a physical, a chemical sensor and a biosensor


Students who enroll in the subject should be able to explain the physical principles of the curriculum of high school physics. He should know ohm's law, calculate capacitor capacitance, know the difference between own and improper semiconductor, P and N semiconductor, discuss the difference between bipolar and unipolar transistor, diode function and know the basic distribution of energy bands of electromagnetic waves. Generally, knowledge is required at the bachelor level.
Work in the laboratory is subject to the valid qualification of the "instructed worker" according to the Decree. 50/1978 Coll., Which students must acquire before commencement of teaching. Information on this qualification can be found in the Dean's Guidance on Safety Regulations.


Not applicable.

Planned learning activities and teaching methods

Teaching methods depend on the type of course unit as specified in the article 7 of BUT Rules for Studies and Examinations.
It is including:
lectures using form of technical seminary;
self-reliant practice laboratory exercise including preparation and elaboration of report;
using LMS Moodle, practical demonstration, visit of research laboratory of microsensers at FEEC, and core laboratories at CEITEC.

Assesment methods and criteria linked to learning outcomes

The conditions for the successful completion of the course are set by an updated regulation of the course guarantor. Information is given in the test rules on the subject's website.

Course curriculum

1. Introduction to sensor technics
2. Fundametals of microelectronics technology
3. MicroElectroMechanical Systems (MEMS)
4. Resistive sensors
5. Capacitive sensors
6. Inductance sensors
7. Generating sensors
8. Semicoductive sensors
9. Optical sensors
10. Special sensors
11. Chcemical sensors and biosensors

Work placements

Not applicable.


Target of the course is to present theory, principles and design of microsensors and microelectromechanical systems (MEMS), to train how to design microsystems and their application.

Specification of controlled education, way of implementation and compensation for absences

The content and forms of instruction in the evaluated course are specified by a regulation issued by the lecturer responsible for the course and updated for every academic year.

Recommended optional programme components

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

Hubálek, J., Prášek, J., Pekárková, J., Bendová, M., Drbohlavová, J., Majzlíková, P.: Microsensors and Microelectromechanical Systems. Brno: 2015. (EN)

Recommended reading

Julian W. Gardner; Microsensors : Principles and Applications. John Wiley & Sons Inc., 2020, ISBN 0470850434 (EN)
Czichos Horst; Measurement, Testing and Sensor Technology: Fundamentals and Application to Materials and Technical Systems. Springer International Publishing AG, 2018, ISBN 9783319763842 (EN)

Classification of course in study plans

  • Programme MPA-MEL Master's, any year of study, summer semester, elective
  • Programme MPAD-MEL Master's, any year of study, summer semester, elective

Type of course unit



26 hours, optionally

Teacher / Lecturer

Laboratory exercise

26 hours, compulsory

Teacher / Lecturer