Course detail
Diagnostic Methods in Electroengineering
FEKT-LDMEAcad. year: 2015/2016
Organization of testing in Czech Rep. and EU. Diagnostic methods for evaluation of properties and parameters of electroinsulating materials and systems. Diagnostic methods for evaluation of properties of semiconductor wafers and structures, of contamination and defects in semiconductor materials. Diagnostic methods based on exploitation of electron beam for evaluation of structure and composition of materials. Theory of evaluation of measured data.
Guarantor
Learning outcomes of the course unit
- describe theoretical basis of electrical and physical diagnostics methods used for determination of properties, parameters and composition of electrical materials,
- explain general base of processing and evaluating of measured data,
- describe organization of testing and certification in Czech Republic and in European Union,
- define legislative requirements in the field of metrology,
- be knowledgeable in diagnostics methods, plan usage of suitable method for concrete application, including of simple interpretation of obtained information.
Prerequisites
Co-requisites
Recommended optional programme components
Literature
Planned learning activities and teaching methods
Assesment methods and criteria linked to learning outcomes
up to 60 points from written final exam
Final exam is focused on verification of knowledge and orientation in the field of diagnostics methods and organization of testing.
Language of instruction
Work placements
Course curriculum
Diagnostic methods for evaluation of properties of electroinsulating materials and systems in DC electric field.
Diagnostic methods for evaluation of properties of electroinsulating materials and systems in electric field at frequency 50 Hz and at high voltage.
Diagnostic methods for evaluation of properties of electroinsulating materials and systems in electric field at middle and high frequency.
Diagnostic methods connected with evaluation of influence of working conditions on materials properties.
Diagnostic methods for evaluation of electrical properties of semiconductor wafers and structures. Resistivity measurements, four-point probe, spreading resistance, concentration-depth profile. Methods based on evaluation of capacitance-voltage measurement.
Diagnostic methods for contamination and defect detection in semiconductor materials. Microscope techniques. AFM, AES, ESCA and SIMS techniques.
Diagnostic methods based on interaction of electrons with solid. Electron optics, resolution and depth of focus. Electron scattering and diffusion.
Diagnostic methods based on interaction of electrons with solid. Emission of electrons and X-ray quanta. Backscattered electrons and secondary electrons.
Diagnostic methods based on interaction of electrons with solid. Detectors and signal processing. Imaging with backscattered and secondary electrons.
Diagnostic methods based on interaction of electrons with solid. Diffraction crystal structure analysis. Elemental analysis.
Statistic analysis of one-dimensional data. Random sampling characteristics. Spot and interval parameters estimation of normal, exponential and Weibull's distribution.
Aims
Specification of controlled education, way of implementation and compensation for absences
Classification of course in study plans
- Programme EEKR-ML Master's
branch ML-EVM , 2. year of study, winter semester, 6 credits, compulsory
- Programme EEKR-ML1 Master's
branch ML1-EVM , 2. year of study, winter semester, 6 credits, compulsory
- Programme EEKR-CZV lifelong learning
branch ET-CZV , 1. year of study, winter semester, 6 credits, compulsory