Publication detail

Instrument for thin film diagnostics by UV spectroscopic reflectometry

URBÁNEK, M. SPOUSTA, J. NAVRÁTIL, K. SZOTKOWSKI, R. CHMELÍK, R. BUČEK, M. ŠIKOLA, T.

Original Title

Instrument for thin film diagnostics by UV spectroscopic reflectometry

Type

journal article - other

Language

English

Original Abstract

Paper presents an instrument for thin film diagnostics by UV spectroscopic reflectometry

Key words in English

reflectometry, thin films

Authors

URBÁNEK, M.; SPOUSTA, J.; NAVRÁTIL, K.; SZOTKOWSKI, R.; CHMELÍK, R.; BUČEK, M.; ŠIKOLA, T.

RIV year

2004

Released

1. 1. 2004

ISBN

0142-2421

Periodical

Surface and Interface Analysis

Year of study

36

Number

8

State

United Kingdom of Great Britain and Northern Ireland

Pages from

1102

Pages to

1105

Pages count

4

BibTex

@article{BUT42362,
  author="Michal {Urbánek} and Jiří {Spousta} and Karel {Navrátil} and Robert {Szotkowski} and Radim {Chmelík} and Miroslav {Buček} and Tomáš {Šikola}",
  title="Instrument for thin film diagnostics by UV spectroscopic reflectometry",
  journal="Surface and Interface Analysis",
  year="2004",
  volume="36",
  number="8",
  pages="4",
  issn="0142-2421"
}