Publication detail

The planar anodic Al2O3-ZrO2 nanocomposite capacitor dielectrics for advanced passive device integration

KAMNEV, K. PYTLÍČEK, Z. BENDOVÁ, M. PRÁŠEK, J. GISPERT-GUIRADO, F. LLOBET, E. MOZALEV, A.

Original Title

The planar anodic Al2O3-ZrO2 nanocomposite capacitor dielectrics for advanced passive device integration

Type

journal article in Web of Science

Language

English

Original Abstract

The need for integrated passive devices (IPDs) emerges from the increasing consumer demand for electronic product miniaturization. Metal-insulator-metal (MIM) capacitors are vital components of IPD systems. Developing new materials and technologies is essential for advancing capacitor characteristics and co-integrating with other electronic passives. Here we present an innovative electrochemical technology joined with the sputter-deposition of Al and Zr layers to synthesize novel planar nanocomposite metal-oxide dielectrics consisting of ZrO2 nanorods self-embedded into the nanoporous Al2O3 matrix such that its pores are entirely filled with zirconium oxide. The technology is utilized in MIM capacitors characterized by modern surface and interface analysis techniques and electrical measurements. In the 95-480 nm thickness range, the best-achieved MIM device characteristics are the one-layer capacitance density of 112 nF center dot cm(-2), the loss tangent of 4 center dot 10(-3) at frequencies up to 1 MHz, the leakage current density of 40 pA center dot cm(-2), the breakdown field strength of up to 10 MV center dot cm(-1), the energy density of 100 J center dot cm(-3), the quadratic voltage coefficient of capacitance of 4 ppm center dot V-2, and the temperature coefficient of capacitance of 480 ppm center dot K-1 at 293-423 K at 1 MHz. The outstanding performance, stability, and tunable capacitors' characteristics allow for their application in low-pass filters, coupling/decoupling/bypass circuits, RC oscillators, energy-storage devices, ultrafast charge/discharge units, or high-precision analog-to-digital converters. The capacitor technology based on the non-porous planar anodic-oxide dielectrics complements the electrochemical conception of IPDs that combined, until now, the anodized aluminum interconnection, microresistors, and microinductors, all co-related in one system for use in portable electronic devices.

Keywords

Anodizing; porous anodic alumina; Al2O3-ZrO2; nanocomposite films; MIM capacitors; dielectric; integrated passives

Authors

KAMNEV, K.; PYTLÍČEK, Z.; BENDOVÁ, M.; PRÁŠEK, J.; GISPERT-GUIRADO, F.; LLOBET, E.; MOZALEV, A.

Released

31. 12. 2023

Publisher

Taylor & Francis

Location

ABINGDON

ISBN

1878-5514

Periodical

Science and Technology of Advanced Materials

Year of study

24

Number

1

State

Japan

Pages from

1

Pages to

17

Pages count

17

URL

https://www.tandfonline.com/doi/full/10.1080/14686996.2022.2162324

Full text in the Digital Library

http://hdl.handle.net/11012/213606

BibTex

@article{BUT184117,
  author="Kirill {Kamnev} and Zdeněk {Pytlíček} and Mária {Bendová} and Jan {Prášek} and Francesc {Gispert-Guirado} and Eduard {Llobet} and Alexander {Mozalev}",
  title="The planar anodic Al2O3-ZrO2 nanocomposite capacitor dielectrics for advanced passive device integration",
  journal="Science and Technology of Advanced Materials",
  year="2023",
  volume="24",
  number="1",
  pages="17",
  doi="10.1080/14686996.2022.2162324",
  issn="1878-5514",
  url="https://www.tandfonline.com/doi/full/10.1080/14686996.2022.2162324"
}