Publication detail

Depth profiling of thin plasma-polymerized amine films using GDOES in an Ar-O-2 plasma

KOVAČ, J. EKAR, J. ČEKADA, M. ZAJÍČKOVÁ, L. NEČAS, D. BLAHOVÁ, L. WANG, J. MOZETIČ, M.

Original Title

Depth profiling of thin plasma-polymerized amine films using GDOES in an Ar-O-2 plasma

Type

journal article in Web of Science

Language

English

Original Abstract

Thin polymer films were deposited on polished stainless-steel samples by PECVD from a cyclopropylamine precursor and characterized by X-ray photoelectron spectroscopy, secondary-ion mass spectrometry and glow discharge optical emission spectroscopy (GDOES) depth profiling. These depth profiles exhibited reasonable agreement. The GDOES involved the erosion of the polymer films in plasma sustained by an asymmetric RF capacitively coupled discharge using both Ar and Ar-O-2 gases. The application of pure Ar caused unwanted effects, such as the broadening of the polymer-film/substrate interface, which were suppressed when using the mixture with oxygen. Another benefit of oxygen was a significant increase in the etching rate by a factor of about 15 as compared to pure argon. The mechanisms involved in the depth profiling using the mixture of gases were elaborated in some detail, taking into account plasma parameters typical for an asymmetric, capacitively coupled RF discharge in a small volume. The main benefit of using the Ar/O-2 GDOES profiling with respect to XPS and SIMS depth profiling is the increased sputtering rate for polymer films. Comparing the GDOES depth profiling with the Ar/O-2 mixture with profiling in pure Ar, the benefits are a higher sputtering rate and better depth resolution at the polymer/substrate interface.

Keywords

GDOES; Depth profile; Amine plasma polymer; Ar-O-2 plasma

Authors

KOVAČ, J.; EKAR, J.; ČEKADA, M.; ZAJÍČKOVÁ, L.; NEČAS, D.; BLAHOVÁ, L.; WANG, J.; MOZETIČ, M.

Released

15. 4. 2022

Publisher

ELSEVIER

Location

AMSTERDAM

ISBN

1873-5584

Periodical

APPLIED SURFACE SCIENCE

Year of study

581

Number

1

State

Kingdom of the Netherlands

Pages from

1

Pages to

10

Pages count

10

URL

https://www.sciencedirect.com/science/article/pii/S0169433221033171?via%3Dihub

Full text in the Digital Library

http://hdl.handle.net/11012/209187

BibTex

@article{BUT179263,
  author="Janez {Kovač} and Jernej {Ekar} and Miha {Čekada} and Lenka {Zajíčková} and David {Nečas} and Lucie {Janů} and Jiang Yong {Wang} and Miran {Mozetič}",
  title="Depth profiling of thin plasma-polymerized amine films using GDOES in an Ar-O-2 plasma",
  journal="APPLIED SURFACE SCIENCE",
  year="2022",
  volume="581",
  number="1",
  pages="10",
  doi="10.1016/j.apsusc.2021.152292",
  issn="1873-5584",
  url="https://www.sciencedirect.com/science/article/pii/S0169433221033171?via%3Dihub"
}