Publication detail

Electromagnetic Modeling of a Plasma Chamber: Theory and Experiments

FIALA, P. DREXLER, P. KLÍMA, M. SZABÓ, Z. DOSTÁL, L. KADLEC, R. PERNICA, R.

Original Title

Electromagnetic Modeling of a Plasma Chamber: Theory and Experiments

Type

conference paper

Language

English

Original Abstract

We propose finite element method — based models facilitating simulation of tuned plasma discharges in an argon atmosphere. The models, in which we focused on the adjustment options and relevant numerical analyses, allowed us to design a plasma discharge jet and to characterize the behavior of a discharge therein. A set of functional experiments were performed, evaluated, and compared throughout the research. Overall, the plasma chamber finds use in surface treatment at a nanometric distance from the material-air interface; such a procedure can produce special layers of inorganic/organic materials conceived as resonant structures. The paper exposes the ability of a plasma discharge to operate as a parametric instrument that alters the electromagnetic and mechanical properties on the surface of the applied material.

Keywords

plasma, discharge, argon, jet, electromagnetic field, numerical analysis

Authors

FIALA, P.; DREXLER, P.; KLÍMA, M.; SZABÓ, Z.; DOSTÁL, L.; KADLEC, R.; PERNICA, R.

Released

21. 11. 2021

Publisher

IEEE

ISBN

978-1-7281-7247-7

Book

2021 Photonics & Electromagnetics Research Symposium (PIERS)

ISBN

1559-9450

Periodical

Progress In Electromagnetics

State

United States of America

Pages from

609

Pages to

613

Pages count

5

URL

https://ieeexplore.ieee.org/document/9694874

BibTex

@inproceedings{BUT177622,
  author="Pavel {Fiala} and Petr {Drexler} and Miloš {Klíma} and Zoltán {Szabó} and Lukáš {Dostál} and Radim {Kadlec} and Roman {Pernica}",
  title="Electromagnetic Modeling of a Plasma Chamber: Theory and Experiments",
  booktitle="2021 Photonics & Electromagnetics Research Symposium (PIERS)",
  year="2021",
  journal="Progress In Electromagnetics",
  pages="609--613",
  publisher="IEEE",
  doi="10.1109/PIERS53385.2021.9694874",
  isbn="978-1-7281-7247-7",
  issn="1559-9450",
  url="https://ieeexplore.ieee.org/document/9694874"
}