Publication detail

Mechanical strain and electric-field modulation of graphene transistors integrated on MEMS cantilevers

GABLECH, I. BRODSKÝ, J. VYROUBAL, P. PIASTEK, J. BARTOŠÍK, M. PEKÁREK, J.

Original Title

Mechanical strain and electric-field modulation of graphene transistors integrated on MEMS cantilevers

Type

journal article in Web of Science

Language

English

Original Abstract

This work proposes a structure which allows characterization of graphene monolayers under combined electric field and mechanical strain modulation. Our approach is based on a cantilever integrated into a two-dimensional graphene-based field effect transistor (FET). This allows us to change graphene properties either separately or together via two methods. The first way involves electric field induced by the gate. The second is induction of mechanical strain caused by external force pushing the cantilever up or down. We fabricated devices using silicon-on-insulator wafer with practically zero value of residual stress and a high‑ quality dielectric layer which allowed us to precisely characterize structures using both mentioned stimuli. We used the electric field/strain interplay to control resistivity and position of the charge neutrality point often described as the Dirac point of graphene. Furthermore, values of cantilever to bend after the structure is released. Our device demonstrates a novel method of tuning the physical properties of graphene in silicon and/or complementary metal‑oxide‑semiconductor technology, and is thus promising for tunable physical or chemical sensors.

Keywords

graphene FET, MEMS, cantilever, strain, stress

Authors

GABLECH, I.; BRODSKÝ, J.; VYROUBAL, P.; PIASTEK, J.; BARTOŠÍK, M.; PEKÁREK, J.

Released

6. 1. 2022

Publisher

Springer US

Location

New York

ISBN

0022-2461

Periodical

Journal of Materials Science

Year of study

57

Number

3

State

United States of America

Pages from

1923

Pages to

1935

Pages count

13

URL

https://link.springer.com/article/10.1007/s10853-021-06846-6

BibTex

@article{BUT175593,
  author="Imrich {Gablech} and Jan {Brodský} and Petr {Vyroubal} and Jakub {Piastek} and Miroslav {Bartošík} and Jan {Pekárek}",
  title="Mechanical strain and electric-field modulation of graphene transistors integrated on MEMS cantilevers",
  journal="Journal of Materials Science",
  year="2022",
  volume="57",
  number="3",
  pages="1923--1935",
  doi="10.1007/s10853-021-06846-6",
  issn="0022-2461",
  url="https://link.springer.com/article/10.1007/s10853-021-06846-6"
}