Publication detail

Testing the performance of Murphy-Good plots when applied to current-voltage characteristics of Si field electron emission tips

ALLAHAM, M. BUCHNER, P. SCHREINER, R. KNÁPEK, A.

Original Title

Testing the performance of Murphy-Good plots when applied to current-voltage characteristics of Si field electron emission tips

Type

conference paper

Language

English

Original Abstract

Murphy-Good plots are the most recent type of the analysis methods in the field electron emission theory, this type of plots has several useful characteristics such as: having the very-nearly straight line to represent the current-voltage characteristics and the absence of the correction factors in the mathematical procedure of the analysis process. In this study, n-type <111> and <100> Si chips containing four individual emitters are used as base emitters and mounted in a diode configuration field emission setup where the experiments are operated in an ultra-high vacuum (~10 -7 Pa). Each chip has four individual controllable emitters with 5 µm distance between the Si tips and the same material grid. Laser micromachining and subsequent wet chemical etching technique is used to structure and polish the tips. Murphy-Good plots are used to study the behavior of the Si individual tips and compare the results with the array current by extracting the field emission characterization parameters of the emitters.

Keywords

Si field emitters; cathode current; grid current; Murphy-Good analysis; field emisison

Authors

ALLAHAM, M.; BUCHNER, P.; SCHREINER, R.; KNÁPEK, A.

Released

17. 11. 2021

Publisher

2021 34th International Vacuum Nanoelectronics Conference (IVNC)

Location

Lyon, France

ISBN

978-1-6654-2589-6

Book

2021 34th International Vacuum Nanoelectronics Conference (IVNC)

ISBN

2380-6311

Periodical

2021 34th International Vacuum Nanoelectronics Conference (IVNC)

State

United States of America

Pages from

1

Pages to

2

Pages count

2

URL

https://ieeexplore.ieee.org/document/9600690

BibTex

@inproceedings{BUT175227,
  author="Mohammad Mahmoud {Allaham} and Philipp {Buchner} and Rupert {Schreiner} and Alexandr {Knápek}",
  title="Testing the performance of Murphy-Good plots when applied to current-voltage characteristics of Si field electron emission tips",
  booktitle="2021 34th International Vacuum Nanoelectronics Conference (IVNC)",
  year="2021",
  journal="2021 34th International Vacuum Nanoelectronics Conference (IVNC)",
  pages="1--2",
  publisher="2021 34th International Vacuum Nanoelectronics Conference (IVNC)",
  address="Lyon, France",
  doi="10.1109/IVNC52431.2021.9600690",
  isbn="978-1-6654-2589-6",
  issn="2380-6311",
  url="https://ieeexplore.ieee.org/document/9600690"
}