Publication detail

The Growth, Composition, and Functional Properties of Self-Organized Nanostructured ZrO2-Al2O3 Anodic Films for Advanced Dielectric Applications

KAMNEV, K. SEPÚLVEDA SEPÚLVEDA, L. BENDOVÁ, M. PYTLÍČEK, Z. PRÁŠEK, J. KOLÍBALOVÁ, E. MICHALIČKA, J. MOZALEV, A.

Original Title

The Growth, Composition, and Functional Properties of Self-Organized Nanostructured ZrO2-Al2O3 Anodic Films for Advanced Dielectric Applications

Type

journal article in Web of Science

Language

English

Original Abstract

An aluminum-on-zirconium bilayer is anodized in oxalic acid solution to transform the Al layer into porous anodic alumina (PAA); this is followed by the PAA-assisted re-anodizing of the Zr underlayer at voltages 40-280 V. The process results in an array of amorphous ZrO2 nanocolumns, 45-330 nm long, partly filling the PAA pores and anchored to a continuous bottom oxide layer under the pores, 20-130 nm thick, comprising a ZrO1.8 spongelike sublayer superimposed on a ZrO1.5 compact sublayer. The thicknesses of the nanostructured and bottom oxides increase linearly with re-anodizing voltage, disclosing a low film formation ratio of 1.65 nm V-1, which is impossible with anodic ZrO2. The amorphous ZrO2 nanocolumns embedded in the highly resistive amorphous PAA matrix combined with the laminated bottom oxide reveal a nearly ideal dielectric performance in a wide frequency range (10(-4)-10(4) Hz) complemented by the low leakage currents and high breakdown voltages (up to 280 V). The film permittivity may be tuned, from 11 to 20, by combining the anodizing and pore-widening techniques. The advantageous architecture, fabrication approach, and functional properties of the films allow the design of a prototype of an emerging hybrid polymer electrolytic microcapacitor for on-chip integration.

Keywords

anodizing; capacitor; dielectric properties; porous anodic alumina; ZrO;

Authors

KAMNEV, K.; SEPÚLVEDA SEPÚLVEDA, L.; BENDOVÁ, M.; PYTLÍČEK, Z.; PRÁŠEK, J.; KOLÍBALOVÁ, E.; MICHALIČKA, J.; MOZALEV, A.

Released

8. 9. 2021

Publisher

WILEY

Location

HOBOKEN

ISBN

2052-1537

Periodical

MATERIALS CHEMISTRY FRONTIERS

Year of study

7

Number

2100505

State

United Kingdom of Great Britain and Northern Ireland

Pages from

1

Pages to

13

Pages count

13

URL

https://onlinelibrary.wiley.com/doi/10.1002/aelm.202100505

BibTex

@article{BUT173305,
  author="Kirill {Kamnev} and Lina Marcela {Sepúlveda Sepúlveda} and Mária {Bendová} and Zdeněk {Pytlíček} and Jan {Prášek} and Eva {Kolíbalová} and Jan {Michalička} and Alexander {Mozalev}",
  title="The Growth, Composition, and Functional Properties of Self-Organized Nanostructured ZrO2-Al2O3 Anodic Films for Advanced Dielectric Applications",
  journal="MATERIALS CHEMISTRY FRONTIERS",
  year="2021",
  volume="7",
  number="2100505",
  pages="1--13",
  doi="10.1002/aelm.202100505",
  issn="2052-1537",
  url="https://onlinelibrary.wiley.com/doi/10.1002/aelm.202100505"
}