Publication detail

Multiple-fibre interferometry setup for probe sample interaction measurements in atomic force microscopy

KLAPETEK, P. YACOOT, A. HORTVÍK, V. DUCHOŇ, V. DONGMO, H. ŘEŘUCHA, Š. VALTR, M. NEČAS, D.

Original Title

Multiple-fibre interferometry setup for probe sample interaction measurements in atomic force microscopy

Type

journal article in Web of Science

Language

English

Original Abstract

Atomic force microscopy (AFM) often relies on the assumption that cantilever bending can be described by simple beam theory and that the displacement of the tip can be evaluated from the cantilever angle. Some more advanced metrological instruments use free-space or fibre interferometers for measuring the position of the cantilever apex directly, thereby simplifying the metrology traceability chain. The next logical development, covering measurements of both the cantilever apex position and its deformation due to lateral forces acting during different AFM measurement regimes, is presented in this paper. It is based on using a set of closely packed fibre interferometers that can be used to determine localised bending of the cantilever at different positions along the cantilever. This can be used for detection of cantilever deformation beyond classical beam theory, and can yield both better understanding of sources of uncertainty in individual AFM force-distance measurements and more accurate scanning in constant height mode in high-speed AFM applications.

Keywords

atomic force microscopy; interferometry; metrology

Authors

KLAPETEK, P.; YACOOT, A.; HORTVÍK, V.; DUCHOŇ, V.; DONGMO, H.; ŘEŘUCHA, Š.; VALTR, M.; NEČAS, D.

Released

1. 9. 2020

Publisher

IOP Publishing

Location

BRISTOL

ISBN

0957-0233

Periodical

Measurement Science and Technology

Year of study

31

Number

9

State

United Kingdom of Great Britain and Northern Ireland

Pages from

1

Pages to

11

Pages count

11

URL

https://iopscience.iop.org/article/10.1088/1361-6501/ab85d8

Full text in the Digital Library

http://hdl.handle.net/11012/196528

BibTex

@article{BUT169073,
  author="Petr {Klapetek} and Andrew {Yacoot} and Václav {Hortvík} and Václav {Duchoň} and Herve {Dongmo} and Šimon {Řeřucha} and Miroslav {Valtr} and David {Nečas}",
  title="Multiple-fibre interferometry setup for probe sample interaction measurements in atomic force microscopy",
  journal="Measurement Science and Technology",
  year="2020",
  volume="31",
  number="9",
  pages="1--11",
  doi="10.1088/1361-6501/ab85d8",
  issn="0957-0233",
  url="https://iopscience.iop.org/article/10.1088/1361-6501/ab85d8"
}