Publication detail

Design of the shape of the experimental chamber for the analysis of the velocity layout in the differential pumped chamber

LEPLTOVÁ, K. MAXA, J. HLAVATÁ, P. BÍLEK, M.

Original Title

Design of the shape of the experimental chamber for the analysis of the velocity layout in the differential pumped chamber

Type

conference paper

Language

English

Original Abstract

This article builds on a series of articles devoted to the issue of pumping in the differentially pumped chamber. This article is based on a study by Dr. Danilatos, where pumping of the differential pumped chamber is solved using the Monte Carlo statistical method. For solving the issue use the mechanics continuum with experimental verification. The work deals with the influence of location measuring pitot tube in experimental chamber.

Keywords

Dr. Danilatos, Monte Carlo, ANSYS Fluent, differentially pumped chamber, environmental scanning electron microscope

Authors

LEPLTOVÁ, K.; MAXA, J.; HLAVATÁ, P.; BÍLEK, M.

Released

30. 11. 2017

Publisher

Electrochemical Society Inc.

ISBN

9781607688297

Book

ECS Transactions

Edition

81

Edition number

1

ISBN

1938-5862

Periodical

ECS Transactions

Year of study

81

Number

1

State

United States of America

Pages from

323

Pages to

328

Pages count

6

URL

https://iopscience.iop.org/article/10.1149/08101.0323ecst/pdf

BibTex

@inproceedings{BUT140328,
  author="Kristýna {Lepltová} and Jiří {Maxa} and Pavla {Šabacká} and Michal {Bílek}",
  title="Design of the shape of the experimental chamber for the analysis of the velocity
layout in the differential pumped chamber",
  booktitle="ECS Transactions",
  year="2017",
  series="81",
  journal="ECS Transactions",
  volume="81",
  number="1",
  pages="323--328",
  publisher="Electrochemical Society Inc.",
  doi="10.1149/08101.0323ecst",
  isbn="9781607688297",
  issn="1938-5862",
  url="https://iopscience.iop.org/article/10.1149/08101.0323ecst/pdf"
}