Publication detail

Analysis of the Gas Flow in the Specimen Chamber of the Environmental Scanning Electron Microscope

BÍLEK, M. HLAVATÁ, P. VYROUBAL, P.

Original Title

Analysis of the Gas Flow in the Specimen Chamber of the Environmental Scanning Electron Microscope

Type

conference paper

Language

English

Original Abstract

The article describes the analysis of the specimen chamber in environmental scanning electron microscope AQUASEM II. It was designed six concepts of specimen chamber surrounding the sample holder. The concepts differ in the shape of the sample holder and the entry into the differentially pumped chamber. The purpose was to optimize the area surrounding the sample for minimizing of the speed of the gas flow in nearest surrounding of the sample for reducing of the speed of the sample drying

Keywords

ANSYS, EREM, AQUASEM II

Authors

BÍLEK, M.; HLAVATÁ, P.; VYROUBAL, P.

Released

7. 12. 2016

ISBN

978-80-214-5109-4

Book

ECS Transactions

ISBN

1938-5862

Periodical

ECS Transactions

State

United States of America

Pages from

267

Pages to

273

Pages count

6

BibTex

@inproceedings{BUT129482,
  author="Michal {Bílek} and Pavla {Šabacká} and Petr {Vyroubal}",
  title="Analysis of the Gas Flow in the Specimen Chamber of the Environmental Scanning Electron Microscope",
  booktitle="ECS Transactions",
  year="2016",
  journal="ECS Transactions",
  pages="267--273",
  doi="10.1149/07401.0267ecst",
  isbn="978-80-214-5109-4",
  issn="1938-5862"
}