Publication detail

Skenovací optická mikroskopie v blízkém poli jako nástroj lokální charakterizace elektronických součástek

MÜLLER, P.

Original Title

Skenovací optická mikroskopie v blízkém poli jako nástroj lokální charakterizace elektronických součástek

English Title

Near-field scanning optical microscopy as a tool of local characterization of electronic devices

Type

conference paper

Language

Czech

Original Abstract

The development of micro and nanoelectronics and nanophotonics needs novel characteri-zation techniques to ensure higher quality of designed devices. The paper describes a use of Scanning Near-field Optical Microscopy (SNOM) in dimensional control and in local investigation of diverse physical parameters. As example of its potential, the correlation between object topography and reflection measurement of tantalum condenser is shown.

English abstract

The development of micro and nanoelectronics and nanophotonics needs novel characteri-zation techniques to ensure higher quality of designed devices. The paper describes a use of Scanning Near-field Optical Microscopy (SNOM) in dimensional control and in local investigation of diverse physical parameters. As example of its potential, the correlation between object topography and reflection measurement of tantalum condenser is shown.

Keywords

Skenovací optická mikroskopie v blízkém poli, lokální charakterizace, elektronická součástka

Key words in English

Near-field scanning optical microscopy, local characterization, electronic device

Authors

MÜLLER, P.

RIV year

2010

Released

29. 4. 2010

Publisher

Novpress, s.r.o.

Location

Brno

ISBN

978-80-214-4077-7

Book

Proceedings of the 16th conference STUDENT EEICT 2010, vol. 2

Pages from

195

Pages to

197

Pages count

3

BibTex

@inproceedings{BUT29820,
  author="Pavel {Müller}",
  title="Skenovací optická mikroskopie v blízkém poli jako nástroj lokální charakterizace elektronických součástek",
  booktitle="Proceedings of the 16th conference STUDENT EEICT 2010, vol. 2",
  year="2010",
  pages="195--197",
  publisher="Novpress, s.r.o.",
  address="Brno",
  isbn="978-80-214-4077-7"
}