Publication detail

Correlation of the total induced amorphization in SiC crystal with the ion implantation fluence

GLOGINJIC, M. ERICH, M. MRAVIK, Ž. VRBAN, B. ČERBA, Š. LÜLEY, J. FILOVÁ, V. KATOVSKÝ, K. ŠŤASTNÝ, O. BURIAN, J. PETROVIC, S.

Original Title

Correlation of the total induced amorphization in SiC crystal with the ion implantation fluence

Type

article in a collection out of WoS and Scopus

Language

English

Original Abstract

During the ion implantation process, regardless if it was attentional or not, amorphization will be introduced into the crystal structure. Depending on the chosen ions, different quantities of the amorphization will be introduced for the same applied fluences. In order to estimate the total amorphization of the SiC crystal for different ions and fluences combination, an assessment model was proposed. For this purpose, 4 MeV carbon and silicon ions with multiple fluences were implanted in the axial direction of a 6H-SiC single crystal. The amorphization depth distributions were obtained by Elastic Backscattering Spectroscopy/channeling spectra analysis via Channeling SIMulation (CSIM) phenomenological computer code. As a result, relation of the total induced amorphization and implantation fluences for carbon and silicon ions were obtained.

Keywords

ion implantation; SiC; carbon ions; silicon ions; 4 MeV; Elastic Backscattering Spectroscopy

Authors

GLOGINJIC, M.; ERICH, M.; MRAVIK, Ž.; VRBAN, B.; ČERBA, Š.; LÜLEY, J.; FILOVÁ, V.; KATOVSKÝ, K.; ŠŤASTNÝ, O.; BURIAN, J.; PETROVIC, S.

Released

22. 9. 2022

Publisher

Serbian Ceramic Society

Location

Belgrade, Republic of Serbia

ISBN

978-86-915627-9-3

Book

Proc. of 10th Serbian Ceramic Society Conference ADVANCED CERAMICS AND APPLICATION X "New Frontiers in Multifunctional Material Science and Processing"

Edition

1

Edition number

1

Pages count

1

URL

https://vinar.vin.bg.ac.rs/handle/123456789/10822

BibTex

@inproceedings{BUT184164,
  author="Marko {Gloginjic} and Marko {Erich} and Željko {Mravik} and Branislav {Vrban} and Štefan {Čerba} and Jakub {Lüley} and Vendula {Filová} and Karel {Katovský} and Ondřej {Šťastný} and Jiří {Burian} and Srdjan {Petrovic}",
  title="Correlation of the total induced amorphization in SiC crystal with the ion implantation fluence",
  booktitle="Proc. of 10th Serbian Ceramic Society Conference ADVANCED CERAMICS AND APPLICATION X {"}New Frontiers in Multifunctional Material Science and Processing{"}",
  year="2022",
  series="1",
  number="1",
  pages="1",
  publisher="Serbian Ceramic Society",
  address="Belgrade, Republic of Serbia",
  isbn="978-86-915627-9-3",
  url="https://vinar.vin.bg.ac.rs/handle/123456789/10822"
}