Publication detail

Effect Of Al2O3 Barrier On The Field Emission Properties Of Tungsten Single-Tip Field Emitters

Burda D., Knápek A.

Original Title

Effect Of Al2O3 Barrier On The Field Emission Properties Of Tungsten Single-Tip Field Emitters

Type

conference paper

Language

English

Original Abstract

This research aims to obtain a more in-depth understanding of the field emission properties of tungsten single-tip field emitters (STFEs) coated with a several tens of nanometer thin barrier of Al2O3. The introduction of an additional barrier into the metal-vacuum interface system of the emitter can be beneficial to improve its performance. The tungsten emitters were prepared using a two-step electrochemical drop-off etching technique. Thin oxide barrier coatings were prepared by using low-temperature atomic layer deposition (ALD), a chemical vapor deposition technique. Field emission was studied in an internally developed field emission microscope (FEM) working in UHV vacuum (< 1·10−7 Pa), and the experimental field emission data were analyzed by the so-called Murphy-Good plotsThe value of the local work function of the grown oxide layer were investigated using Ultra-violet photoelectron spectroscopy (UPS).

Keywords

Cold field emission; single-tip field emitters; tungsten tip; aluminum oxide; dielectric coatings; Murphy-Good plot

Authors

Burda D., Knápek A.

Released

26. 4. 2022

Publisher

Brno University of Technology, Faculty of Electrical Engineering and Communication

Location

Brno

ISBN

978-80-214-6030-0

Book

Proceedings II of the 28th Conference STUDENT EEICT 2022 Selected papers

Edition

1

Pages from

255

Pages to

258

Pages count

4

URL

https://www.eeict.cz/eeict_download/archiv/sborniky/EEICT_2022_sbornik_2_v3.pdf

BibTex

@inproceedings{BUT180625,
  author="Daniel {Burda} and Alexandr {Knápek}",
  title="Effect Of Al2O3 Barrier On The Field Emission Properties Of Tungsten Single-Tip Field Emitters",
  booktitle="Proceedings II of the 28th Conference STUDENT EEICT 2022 Selected papers",
  year="2022",
  series="1",
  pages="255--258",
  publisher="Brno University of Technology, Faculty of Electrical Engineering and Communication",
  address="Brno",
  doi="10.13164/eeict.2022.255",
  isbn="978-80-214-6030-0",
  url="https://www.eeict.cz/eeict_download/archiv/sborniky/EEICT_2022_sbornik_2_v3.pdf"
}