Applied result detail

AACVD reactor

VALLEJOS VARGAS, S.; HUBÁLEK, J.; PRÁŠEK, J.; PYTLÍČEK, Z.

Original Title

AACVD reactor

English Title

AACVD reactor

Type

Functioning sample

Abstract

The AACVD reactor was built to produce laboratory samples (2 x 2 cm) of nanostructured metal oxide films from metal organic precursors. The reactor can reach deposition temperatures up to 700 degC and it is designed to work with aerosol carrier flows between 0 and 500 sccm.

Abstract in English

The AACVD reactor was built to produce laboratory samples (2 x 2 cm) of nanostructured metal oxide films from metal organic precursors. The reactor can reach deposition temperatures up to 700 degC and it is designed to work with aerosol carrier flows between 0 and 500 sccm.

Keywords

Aerosol assited CVD, metal oxides

Key words in English

Aerosol assited CVD, metal oxides

Location

Centrum SIX, Technická 3058/10, Brno

Licence fee

In order to use the result by another entity, it is always necessary to acquire a license

www

http://www.umel.feec.vutbr.cz/LabSensNano/products.aspx?id=93