This project aims to establish a digitalisation route for dimensional nanometrology focusing mainly on the measurement of dimensions, position, form and roughness at microscale to nanoscale level. The digital chain will start from the digital metre, through reference samples and automated algorithms in measurement instruments, up to the end users outside of the NMIs. Newly developed ‘smart’ samples will contain a priori information (silicon steps and self-assembled structures). Newly developed smart algorithms will enable automated processing of calibration data based on direct measurement data and metadata and propagation of the results inAlthough the primary goal is to focus on Scanning Probe Microscopy as it is the main tool used for nanotechnology, many of the developed methods will be applicable both to other areas of metrology and nanometrology and could be used as a template when developing a digital infrastructure for other areas.

24DIT02

English

Nečas David, Mgr., Ph.D. - principal person responsible

Plasma Technologies for Materials
- responsible department (20.9.2024 - not assigned)
Plasma Technologies for Materials
- beneficiary (20.9.2024 - not assigned)

Responsibility: Nečas David, Mgr., Ph.D.