Detail publikace

A novel hybrid integrated system for capacitive pressure MEMS sensors

HÁZE, J. VRBA, R. PAVLÍK, M.

Originální název

A novel hybrid integrated system for capacitive pressure MEMS sensors

Typ

článek v časopise - ostatní, Jost

Jazyk

angličtina

Originální abstrakt

The paper deals with a novel hybrid integrated system for capacitive pressure MEMS sensors. This system should be splitted into the two parts. One is novel integrated capacity-to-current converter (C/I) and the second is auxiliary part made from standard SMD devices. The C/I converter was designed in CMOS process with technology AMIS 0,7 um. The second part consists of the sigma-delta converter, microcontroller, communication and data bus. The designed system profits from the previous works, where the capacity-to-digital output converter AD 7745 is the main part of the processing stage. This converter is substituted by the novel C/I converter. The C/I converter with digital calibration handled in microcontroller provide almost the same accuracy and linearity as the mentioned AD 7745 converter, but with less complexity of the whole circuitries.

Klíčová slova

MEMS sensor, data acquisition system

Autoři

HÁZE, J.; VRBA, R.; PAVLÍK, M.

Rok RIV

2009

Vydáno

3. 12. 2009

Nakladatel

ZCU Plzen

Místo

Plzen

ISSN

1802-4564

Periodikum

ElectroScope - http://www.electroscope.zcu.cz

Ročník

2009

Číslo

3

Stát

Česká republika

Strany od

41

Strany do

44

Strany počet

4

URL

https://dspace5.zcu.cz/bitstream/11025/548/1/haze.pdf

BibTex

@article{BUT48726,
  author="Jiří {Háze} and Radimír {Vrba} and Michal {Pavlík}",
  title="A novel hybrid integrated system for capacitive pressure MEMS sensors",
  journal="ElectroScope - http://www.electroscope.zcu.cz",
  year="2009",
  volume="2009",
  number="3",
  pages="41--44",
  issn="1802-4564",
  url="https://dspace5.zcu.cz/bitstream/11025/548/1/haze.pdf"
}